Light-beam-induced current (LBIC) technique for semiconductors and ICs testing

J. Domaradzki

doi:10.1117/12.501534

1 April 2003 Light-beam-induced current (LBIC) technique for semiconductors and ICs testing

J. Domaradzki

Proceedings Volume 5064, Lightmetry 2002: Metrology and Testing Techniques Using Light; (2003) https://doi.org/10.1117/12.501534
Event: Lightmetry 2002, 2002, Warsaw, Poland

Abstract

Application of remote controlled measurement system for the Light Beam Induced Current (LBIC) technique equipped with digital data acquisition and processing system in the diagnostics of semiconductors has been described. Point by point scanning of the selected region by focused light beam enables to create distribution maps shown as the digital images with 256 gray shades and as the color images. On the basis of measurement of amplitude and phase of generated photocurrent it is possible to locate electrically active defects existing inside semiconductor structure. In the paper application of LBIC technique in examinations of silicon polycrystalline solar cells has been outlined.

Citation Download Citation

J. Domaradzki "Light-beam-induced current (LBIC) technique for semiconductors and ICs testing", Proc. SPIE 5064, Lightmetry 2002: Metrology and Testing Techniques Using Light, (1 April 2003); https://doi.org/10.1117/12.501534

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