Analyses of tabulated optical constants for thin films in the EUV range and application to solar physics multilayer coatings

Jennifer Rebellato; Evgueni Meltchakov; Regina Soufli; Sébastien De Rossi; Xueyan Zhang; Frédéric Auchère; Franck Delmotte

doi:10.1117/12.2313346

5 June 2018 Analyses of tabulated optical constants for thin films in the EUV range and application to solar physics multilayer coatings

Jennifer Rebellato, Evgueni Meltchakov, Regina Soufli, Sébastien De Rossi, Xueyan Zhang, Frédéric Auchère, Franck Delmotte

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Proceedings Volume 10691, Advances in Optical Thin Films VI; 106911U (2018) https://doi.org/10.1117/12.2313346
Event: SPIE Optical Systems Design, 2018, Frankfurt, Germany

Abstract

The thin film optical constants are key parameters to carry out optical simulation or optimization of multilayer mirrors with high efficiency. However, for most materials, different sets of optical constants can be found in the literature especially in the EUV range, as these parameters are not as well-known in the EUV as in the visible or wavelength range. In this work, we have used several reflectance and transmittance measurements in the wavelength range from 10 nm to 60 nm. Different optical constant files have been tested and compared with the IMD simulation software. We will present some experimental spectra and theoretical simulations to highlight the existing problem on the reliability of optical constants sets and to discuss potential solutions. We focus our research on a few materials of particular interest in the EUV range such as aluminum, aluminum oxide, molybdenum, zirconium, magnesium, silicon carbide, and boron carbide. These analyses lead us to select the most reliable and accurate optical constants set, or to create the best one from the concatenation of existing data for each material of interest.

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Jennifer Rebellato, Evgueni Meltchakov, Regina Soufli, Sébastien De Rossi, Xueyan Zhang, Frédéric Auchère, and Franck Delmotte "Analyses of tabulated optical constants for thin films in the EUV range and application to solar physics multilayer coatings", Proc. SPIE 10691, Advances in Optical Thin Films VI, 106911U (5 June 2018); https://doi.org/10.1117/12.2313346

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KEYWORDS

Aluminum

Extreme ultraviolet

Multilayers

Molybdenum

Mirrors

Silicon carbide

Magnesium

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