Micro-patterning of self-assembled organic monolayers by using tunable ultrafast laser pulses

Stella Maragkaki; Andreas Aumann; Florian Schulz; Anja Schröter; Benjamin Schöps; Steffen Franzka; Nils Hartmann; Andreas Ostendorf

doi:10.1117/12.2037716

7 March 2014 Micro-patterning of self-assembled organic monolayers by using tunable ultrafast laser pulses

Stella Maragkaki, Andreas Aumann, Florian Schulz, Anja Schröter, Benjamin Schöps, Steffen Franzka, Nils Hartmann, Andreas Ostendorf

Author Affiliations +

Proceedings Volume 8972, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIV; 897213 (2014) https://doi.org/10.1117/12.2037716
Event: SPIE LASE, 2014, San Francisco, California, United States

Abstract

We study the application of tunable ultrafast laser pulses in micropatterning self- assembled organic monolayer (SAMs) employing non collinear optical parametric amplification (NOPA). SAMs are ultrathin organic monolayers, which can be used in a variety of ways to assemble functionalized surface structures. In our study, we investigate the characteristics of SAMs as monomolecular resists during etching of gold. NOPA is a versatile method which provides the generation of ultrafast laser pulses, with a tunable wavelength in the visible and near infrared range. Due to the noncollinear geometry, a broadened spectral range can be amplified. The NOPA delivers wavelengths in the range of 480 nm to 950 nm at laser pulse lengths in the sub- 30 femtosecond range using a prism compressor after the nonlinear conversion. The ultrashort laser technology together with the advantages of the NOPA system guarantee high precision and allows us to determine the optimum conditions of sub-wavelength patterning by studying the effects of the fluence and the wavelength. At the same time, single-pulse processing allows us to selectively remove the ultrathin organic coating, while it ensures short processing time. In our study we used thiol-based SAMs as ultrathin layers on gold-coated glass substrates with a film thickness of 1-2 nm and 40 nm respectively.

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Stella Maragkaki, Andreas Aumann, Florian Schulz, Anja Schröter, Benjamin Schöps, Steffen Franzka, Nils Hartmann, and Andreas Ostendorf "Micro-patterning of self-assembled organic monolayers by using tunable ultrafast laser pulses", Proc. SPIE 8972, Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XIV, 897213 (7 March 2014); https://doi.org/10.1117/12.2037716

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KEYWORDS

Self-assembled monolayers

Optical lithography

Gold

Ultrafast lasers

Laser damage threshold

Pulsed laser operation

Glasses

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