New test facility for reflectivity measurements in the extreme ultraviolet spectral region

Paolo Villoresi; Giampiero Naletto; Piergiorgio Nicolosi; Giuseppe Tondello; Ermanno Jannitti

doi:10.1117/12.140566

21 January 1993 New test facility for reflectivity measurements in the extreme- ultraviolet spectral region

Paolo Villoresi, Giampiero Naletto, Piergiorgio Nicolosi, Giuseppe Tondello, Ermanno Jannitti

Proceedings Volume 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography; (1993) https://doi.org/10.1117/12.140566
Event: San Diego '92, 1992, San Diego, CA, United States

Abstract

A test facility for measurements of reflectivity of multilayer coated mirrors, in the 30-300 A domain is described. The facility uses as a source of continuum radiation a plasma produced by focusing a laser beam on a target of high Z material. The laser used is a Q-switched Nd-YLF producing pulses of up to 20 J of energy and of 15 ns duration. The radiation reflected by the mirror under test is dispersed by a grazing incidence spectrograph and recorded with an intensified CCD detector. The facility is quite simple to operate and versatile. Examples of measurements from different mirrors in the range 50-130 A taken with the facility are presented.

Citation Download Citation

Paolo Villoresi, Giampiero Naletto, Piergiorgio Nicolosi, Giuseppe Tondello, and Ermanno Jannitti "New test facility for reflectivity measurements in the extreme- ultraviolet spectral region", Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); https://doi.org/10.1117/12.140566

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