Spatially averaged model of complex-plasma discharge with self-consistent electron energy distribution

I. Denysenko, M. Y. Yu, K. Ostrikov, and A. Smolyakov

Phys. Rev. E 70, 046403 – Published 7 October 2004

Abstract

A global, or averaged, model for complex low-pressure argon discharge plasmas containing dust grains is presented. The model consists of particle and power balance equations taking into account power loss on the dust grains and the discharge wall. The electron energy distribution is determined by a Boltzmann equation. The effects of the dust and the external conditions, such as the input power and neutral gas pressure, on the electron energy distribution, the electron temperature, the electron and ion number densities, and the dust charge are investigated. It is found that the dust subsystem can strongly affect the stationary state of the discharge by dynamically modifying the electron energy distribution, the electron temperature, the creation and loss of the plasma particles, as well as the power deposition. In particular, the power loss to the dust grains can take up a significant portion of the input power, often even exceeding the loss to the wall.

Received 27 December 2003

DOI:https://doi.org/10.1103/PhysRevE.70.046403

Authors & Affiliations

I. Denysenko^* and M. Y. Yu^†

Theoretical Physics I, Ruhr University, D-44780 Bochum, Germany

K. Ostrikov^‡

School of Physics, The University of Sydney, Sydney, NSW 2006, Australia

A. Smolyakov

Department of Physics and Engineering Physics, University of Saskatchewan, Saskatoon, Saskatchewan, Canada S7N 5E2

^*Permanent address: School of Physics and Technology, Kharkiv National University, 61077 Kharkiv, Ukraine.
^†Corresponding author. Email address: yu@tp1.rub.de
^‡Also at Plasma Sources and Applications Center, NIE, Nanyang Technological University, 637616 Singapore.

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Vol. 70, Iss. 4 — October 2004

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