L-shell-ionization cross sections of Si, P, S, Cl, and Ar have been obtained for incident ${\mathrm{H}}^{+}$ energies of 0.4 to 2.0 MeV and for ${\mathrm{H}}_2^{+}$ energies of 0.4 to 1.2 MeV. These relative cross sections were obtained from Auger-electron yields measured from gaseous targets of ${\mathrm{SiH}}_4$, ${\mathrm{PH}}_3$, ${\mathrm{SO}}_2$, ${\mathrm{CH}}_3$Cl, and Ar. The normalized experimental L-shell-ionization cross sections are compared to existing experimental L-shell-ionization cross sections and to various theoretical predictions.

• Received 30 May 1990

DOI:https://doi.org/10.1103/PhysRevA.42.3819