Abstract
A model for film growth from hyperthermal (≊1– eV) species impinging on substrates is proposed. The process includes subsurface implantation, energy loss, preferential displacement of atoms with low displacement energies () leaving high atoms undisplaced, and sputtering of substrate material. Epitaxial growth and preferred orientation result from the angular dependence of the and the host mold effect. The model, supported by ion trajectory calculations and experimental data, is applied to diamond film formation from ions.
- Received 1 August 1988
DOI:https://doi.org/10.1103/PhysRevLett.62.1290
©1989 American Physical Society