We study resonant response of an underdamped nanomechanical resonator with fluctuating frequency. The fluctuations are due to diffusion of molecules or microparticles along the resonator. They lead to broadening and change of shape of the oscillator spectrum. The spectrum is found for the diffusion confined to a small part of the resonator and where it occurs along the whole nanobeam. The analysis is based on extending to the continuous limit, and appropriately modifying, the method of interfering partial spectra. We establish the conditions of applicability of the fluctuation-dissipation relations between the susceptibility and the power spectrum. We also find where the effect of frequency fluctuations can be described by a convolution of the spectra without these fluctuations and with them as the only source of the spectral broadening.

• Received 22 October 2010

DOI:https://doi.org/10.1103/PhysRevB.83.045419