Abstract
Current-voltage behaviors of -based capacitors with electrodes were studied to investigate the dominant leakage mechanism. Epitaxial capacitors were fabricated to simplify the analysis and eliminate any effects of granularity. The characteristics were almost symmetric and temperature dependent with a positive temperature coefficient. The leakage current at low fields (<0.5 V or 10 kV/cm) shows Ohmic behavior with a slope of nearly 1 and is nonlinear at higher voltages and temperatures. Further analysis suggests that at higher fields and temperatures, bulk-limited field-enhanced thermal ionization of trapped carriers (i.e., Poole-Frenkel emission) is the controlling mechanism. The activation energies calculated for the films are in the range 0.5–0.6 eV. These energies are compatible with ion acting as the Poole-Frenkel centers.
- Received 29 June 1998
DOI:https://doi.org/10.1103/PhysRevB.59.16022
©1999 American Physical Society