Multiple wavelength diffractive imaging

Bo Chen, Ruben A. Dilanian, Sven Teichmann, Brian Abbey, Andrew G. Peele, Garth J. Williams, Peter Hannaford, Lap Van Dao, Harry M. Quiney, and Keith A. Nugent
Phys. Rev. A 79, 023809 – Published 6 February 2009

Abstract

We demonstrate coherent diffraction imaging using multiple harmonics from a high-harmonic generation source. An algorithm is presented that builds the known incident spectrum into the reconstruction procedure with the result that the useable flux is increased by more than an order of magnitude. Excellent images are obtained with a resolution of (165±5)nm and compare very well with images from a scanning electron microscope.

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  • Received 19 September 2008

DOI:https://doi.org/10.1103/PhysRevA.79.023809

©2009 American Physical Society

Authors & Affiliations

Bo Chen1, Ruben A. Dilanian1, Sven Teichmann2, Brian Abbey1, Andrew G. Peele3, Garth J. Williams1, Peter Hannaford2, Lap Van Dao2, Harry M. Quiney1, and Keith A. Nugent1

  • 1ARC Centre of Excellence for Coherent X-ray Science, School of Physics, The University of Melbourne, Victoria, 3010, Australia
  • 2ARC Centre of Excellence for Coherent X-ray Science and Centre for Atom Optics and Ultrafast Spectroscopy, Swinburne University of Technology, Hawthorn, Victoria, 3122, Australia
  • 3ARC Centre of Excellence for Coherent X-ray Science, Department of Physics, La Trobe University, Bundoora, Victoria, 3086, Australia

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Issue

Vol. 79, Iss. 2 — February 2009

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