The inversion of far-field scattered intensity to a near-field wave field (image) is demonstrated using soft-x-ray scattering from a random cluster of gold balls. The only a priori information assumed about the scatterer is compact support (an isolated object), a condition enforced by using an atomic force microscope to assist in the preparation of the object. The object support function is obtained from the autocorrelation function of the object. X-ray images of 50-nm-diam gold balls are obtained by this method with 10-nm resolution. The method may be applied to other radiations and to nanostructures and macromolecules which cannot be crystallized. Other favorable types of prepared objects are considered.

• Received 18 December 2002

DOI:https://doi.org/10.1103/PhysRevB.67.174114