Development and performance of Microbulk Micromegas detectors

A new Micromegas manufacturing technique, based on kapton etching technology, has been developed recently, resulting in further improvement of the characteristics of the detector, such as uniformity and stability. Excellent energy resolution has been obtained, reaching 11% FWHM for the 5.9 keV photon peak of the⁵⁵Fe X-ray source and 1.8% FWHM (with possible evidence of less than 1%) for the 5.5 MeV alpha peak of the ²⁴¹Am source. The new Microbulk detector shows several advantages like flexible structure, low material and high radio-purity, opening thus new possibilities for both accelerator and low counting-rate experiments. The detector has already been used in CAST and n-TOF, while it is being tested for future neutrinoless double-beta decay experiments like NEXT. Details of the production of several types of Microbulk detectors will be described. First benchmark results will be presented, demonstrating the enhanced performance of Microbulk detectors.