Abstract
A denser plasma with a lower electron temperature is produced by radio frequency discharge with the use of multi hollow-cathode (HC). The effect of HC discharge and the diffusion of the plasma between HC and anode are depended on the gas pressure. A highly uniform plasma generated on the anode is modified by changing the effective width of grooves on the HC. The correction of the electron density distribution with the effect of HC discharge is important compared with that of the electron temperature distribution.