SEMICONDUCTOR TECHNOLOGY

A multivariate process capability index with a spatial coefficient

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2013 Chinese Institute of Electronics
, , Citation Wang Shaoxi et al 2013 J. Semicond. 34 026001 DOI 10.1088/1674-4926/34/2/026001

1674-4926/34/2/026001

Abstract

After analyzing the multivariate Cpm method (Chan et al. 1991), this paper presents a spatial multivariate process capability index (PCI) method, which can solve a multivariate off-centered case and may provide references for assuring and improving process quality level while achieving an overall evaluation of process quality. Examples for calculating multivariate PCI are given and the experimental results show that the systematic method presented is effective and actual.

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10.1088/1674-4926/34/2/026001