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Fabrication and characterization of RF nanoantenna on a nanoliter-scale 3D microcontainer

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Published 21 October 2011 • IOP Publishing Ltd
, , Citation Jung-rae Park et al 2011 Nanotechnology 22 455303 DOI 10.1088/0957-4484/22/45/455303

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Author affiliations

1 Department of Plastic Engineering, University of Massachusetts, Lowell, MA 01854, USA

2 Department of Chemical and Materials Engineering, University of Idaho, Moscow, ID 83844, USA

3 Department of Chemical and Biomolecular Engineering, Johns Hopkins University, Baltimore, MD 21218, USA

4 Electronics Photonics Laboratory, The Aerospace Corporation, El Segundo, CA 90245-4691, USA

5 Department of Materials Science and Engineering, Korea University, Seoul 136-713, Korea

Dates

  1. Received 10 July 2011
  2. Published

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0957-4484/22/45/455303

Abstract

We report the design and fabrication of a nanoantenna structure on the surface of a 3D nanoliter-scale container for the development of communicable nanoliter-scale chemical delivery systems. The porous container was self-assembled, after which the nanoantenna was fabricated on the top of the microcontainer using focused ion beam (FIB) ion-induced metal deposition. The nanoantenna was structured as a rectangular metal coil composed of platinum (Pt) nanowires (70 nm in width). The response of the nanoantenna structure was simulated using finite element software and showed a strong resonant feature at 10.8 GHz, which was confirmed by high frequency measurements.

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10.1088/0957-4484/22/45/455303