Anisotropic and non-heterogeneous continuum percolation in titanium oxynitride thin columnar films

We report the percolation behaviour of the conductivity of titanium oxynitride films grown by low-pressure metal–organic chemical vapour deposition, composed of TiN_xO_y mixed with TiO₂. The usual DC parameters (t, s and Φ_c), obtained from the effective media theory equations, are compared to the universal values (s = s_un while t < t_un because of the film anisotropy). This is the first example of an electrical continuum percolation applied to columnar films with chemically similar conducting and insulating units (non-heterogeneous percolation) whose mixing is based upon the growth temperature during the film growth.