Molecular beam system controlled by quadrupole mass spectrometer

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, , Citation P Etienne et al 1977 J. Phys. E: Sci. Instrum. 10 1153 DOI 10.1088/0022-3735/10/11/018

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1 Lab. Central de Recherches, Thomson-CSF, Orsay, France

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0022-3735/10/11/1153

Abstract

A molecular beam epitaxy (MBE) apparatus is described in which some improvements over earlier systems have been achieved. An isolation valve permits the introduction of samples without disturbing the ultra-high vacuum system. The beam fluxes are controlled by a quadrupole mass spectrometer; by this means beams of gallium and arsenic can be kept constant to within 1 and 3% respectively.

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