Electron probe microanalysis using oxygen x-rays: II. Absorption correction models

Proposed absorption correction methods for quantitative electron probe microanalysis are evaluated with reference to oxygen analysis of oxides. Three established absorption correction procedures, the Andersen-Wittry, simple Philibert and full Philibert models, are considered and their predictions compared with experimental measurements. The findings are discussed in relation to the x-ray distribution with depth in the target as given by the different models. It is shown that the full Philibert treatment gives best agreement, although none of the models provides a satisfactory absorption correction for practical light-element microanalysis.