Established transfer standards such as Penning and hollow cathode discharge sources suffer from limited spectral range and, in particular, a limited lifetime and stability due to electrode erosion. The development of a vacuum-ultraviolet radiation source based on an electron cyclotron resonance (ECR)-created plasma might overcome these limitations. To test such a source with regard to its usefulness as radiometric transfer standard, the emission intensity of a Ne plasma was monitored over an operation period of 180 days, with regard to stability and reproducibility in the 50–75 nm wavelength range. For comparison and calibration, a hollow cathode was used as transfer standard traceable to the electron storage ring BESSY II as primary standard. It was found that the ECR source exceeded the lifetime of the hollow cathode source by far, offering a more balanced spectral emission line variety with similar stability.
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February 2005
Research Article|
January 05 2005
Stability of vacuum-ultraviolet radiometric transfer standards: Electron cyclotron resonance versus hollow cathode source
Alexander Gottwald;
Alexander Gottwald
a)
Physikalisch-Technische Bundesanstalt
, Abbestraße 2-12, 10587 Berlin, Germany
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Mathias Richter;
Mathias Richter
Physikalisch-Technische Bundesanstalt
, Abbestraße 2-12, 10587 Berlin, Germany
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Gerhard Ulm;
Gerhard Ulm
Physikalisch-Technische Bundesanstalt
, Abbestraße 2-12, 10587 Berlin, Germany
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Udo Schühle
Udo Schühle
Max-Planck-Institut für Aeronomie
, Max-Planck-Straße 2, 37191 Katlenburg-Lindau, Germany
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a)
Electronic mail: alexander.gottwald@ptb.de
Rev. Sci. Instrum. 76, 023101 (2005)
Article history
Received:
June 21 2004
Accepted:
October 29 2004
Citation
Alexander Gottwald, Mathias Richter, Gerhard Ulm, Udo Schühle; Stability of vacuum-ultraviolet radiometric transfer standards: Electron cyclotron resonance versus hollow cathode source. Rev. Sci. Instrum. 1 February 2005; 76 (2): 023101. https://doi.org/10.1063/1.1835051
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