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Closed-loop micromachined accelerometer based on thermal convection

Closed-loop micromachined accelerometer based on thermal convection

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A significant improvement of thermal accelerometer bandwidth κ demonstrated. In a classic open-loop configuration, a micromachined thermal accelerometer having a width of 1500 µm has a sensitivity of 0.045°C/g and a bandwidth up to 66 Hz limited by gas thermal response. A new sensor architecture is proposed to improve bandwidth with no sensitivity decrease: a closed-loop configuration with the addition of two resistors placed close to detectors to rebalance their temperature. They directly act on the thermal response of the fluid. Thus, sensor bandwidth is increased up to 1 kHz with a similar sensitivity of 0.034°C/g.

Inspec keywords: resistors; convection; micromechanical devices; accelerometers; open loop systems; closed loop systems

Other keywords: closed-loop micromachined accelerometer; classic open-loop configuration; gas thermal response; thermal convection; resistors; micromachined thermal accelerometer; closed-loop configuration; thermal accelerometer bandwidth; sensor architecture; thermal response; sensor bandwidth

Subjects: Micromechanical and nanomechanical devices and systems; Sensing devices and transducers; Sensing and detecting devices; Resistors; MEMS and NEMS device technology

References

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      • Leung, A.M., Jones, J., Czyzewska, E., Chen, J., Woods, B.: `Micromachined accelerometer based on convection heat transfer', Proc. IEEE, 11th Int. Conf. MEMS, Heidelberg, Germany, 1998, p. 627–630.
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      • Garraud, A., Combette, P., Gosalbes, J.M., Charlot, B., Giani, A.: `First high-g measurement by thermal accelerometers', Proc. IEEE 16th Int. Conf. Solid-State Sensors, Actuators and Microsystems, Beijing, China, 2011, p. 84–87.
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      • C. Depiets , C. Gervais , A. Renault . Thermal measure of acceleration, speed, position or inclination uses a predetermined volume of heated fluid, compensates for reduction in temperature due to acceleration by using auxiliary heaters.
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      • J. Dido , P. Loisel , A. Renault , P. Combette , N. Crespy , A. Giani . (2006) Thermal accelerometer using multiplexed detection and counter-reaction.
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