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Analysis of planar bulk acoustic wave devices

Analysis of planar bulk acoustic wave devices

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© The Institution of Electrical Engineers
Published

The bulk acoustic waves launched in a piezoelectric crystal by an interdigital transducer, considered earlier as a spurious response in SAW devices, are now usefully employed in planar bulk acoustic wave (BAW) devices. This paper presents the results of a theoretical analysis of bulk wave response in a material. The analysis enables one to design BAW devices with a more desirable response than those obtained so far.

Inspec keywords: ultrasonic devices; ultrasonic propagation; piezoelectric devices; nonlinear acoustics; frequency response; losses

Other keywords: US device; BAW devices; planar bulk acoustic wave devices; bulk wave response; interdigital transducer; frequency response; piezoelectric crystal; ultrasonic wave propagation

Subjects: Acoustic wave devices; Sonic and ultrasonic equipment; Nonlinear acoustics and macrosonics; Acoustical measurements and instrumentation

References

    1. 1)
      • R.S. Wagers , W.P. Mason , R.D. Thurston . (1977) Plate modes in SAW devices, Physical Acoustics.
    2. 2)
      • R.F. Milsom , N.H.C. Reilly , M. Redwood . Analysis of generation and detection of surface and bulk acoustic waves by inter-digital transducers. IEEE Trans. , 147 - 166
    3. 3)
      • R.S. Wagers , R.W. Cohn . Residual bulk mode levels in (YX1)) 128° LiNbO3. IEEE Trans. , 168 - 174
    4. 4)
      • Jhunjhunwala, A., Vetelino, J.F.: `Spectrum of acoustic waves emanating from an IDT on a piezo-electric half space', Ultrasonics Symposium, 1979, p. 945–950.
    5. 5)
      • P.D. Bloch , N.G. Doe , E.G.S. Paige . Behaviour of device structures based on IDT launched bulk acoustic waves in a parallel sided plate of LiNbO3. Electron. Lett. , 871 - 873
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