Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices

Zhi-Jun Zhao; Junseong Ahn; Dongheon Lee; Chan Bae Jeong; Mingu Kang; Jungrak Choi; Moonjeong Bok; Soonhyoung Hwang; Sohee Jeon; Sooyeon Park; Jiwoo Ko; Ki Soo Chang; Jung-Woo Choi; Inkyu Park; Jun-Ho Jeong

doi:10.1039/D1NR07375C

Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices†

Zhi-Jun Zhao,‡^a Junseong Ahn,

‡^bc Dongheon Lee,^d Chan Bae Jeong,^e Mingu Kang,^c Jungrak Choi,^c Moonjeong Bok,^b Soonhyoung Hwang,^b Sohee Jeon,^b Sooyeon Park,^d Jiwoo Ko,^bc Ki Soo Chang,^e Jung-Woo Choi,^d Inkyu Park

*^c and Jun-Ho Jeong

*^b

Author affiliations

* Corresponding authors

^a Institute of Smart City and Intelligent Transportation, Southwest Jiaotong University, No. 999 Pidu District, Chengdu, Sichuan, China

^b Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea
E-mail: jhjeong@kimm.re.kr

^c Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea
E-mail: inkyu@kaist.ac.kr

^d School of Electrical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Republic of Korea

^e Center for Scientific Instrumentation, Korea Basic Science Institute (KBSI), Daejion 34133, Republic of Korea

Abstract

Suspended nanostructures play an important role in enhancing the performance of a diverse group of nanodevices. However, realizing a good arrangement and suspension for nanostructures of various shapes remains a significant challenge. Herein, a rapid and simple method for fabricating wafer-scale, highly uniform, well-arrayed suspended nanostructures via nanowelding lithography is reported. Suspended nanostructures with various shapes (nanowires, nanoholes, nanomesh, and nanofilms) and materials (gold, silver, and palladium metals) were employed to demonstrate the applicability of our method. Moreover, gas sensors and thermoacoustic speakers with suspended nanowires outperformed those with unsuspended nanostructures. The proposed method is expected to help advance the development of future nanodevices based on suspended nanostructures.

Nanoscale

Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices†

Abstract

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Wafer-scale, highly uniform, and well-arrayed suspended nanostructures for enhancing the performance of electronic devices

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