Issue 14, 2010
From the journal:

Soft Matter

Wrinkling evolution of a growing bubble: the wonders of petal-like patterns in amorphous siliconmembranes†

Kayoung Lee,a   Sangwook Lee,a   Dahl-Young Khangb  and  Taeyoon Lee*a  

* Corresponding authors

a Nanobio Device Laboratory, School of Electrical and Electronic Engineering, Yonsei University, 134 Shinchon-Dong, Seodaemun-Gu, Seoul, Korea
E-mail: taeyoon.lee@yonsei.ac.kr
Fax: +82 02 313 2879
Tel: +82 2 2123 5767

b Department of Materials Science and Engineering, Yonsei University, 134 Shinchon-Dong, Seodaemun-Gu, Seoul, Korea

Abstract

A large-area amorphous silicon (a-Si) membrane on an oxidized wafer (SiO2/Si) is detached from the substrate by dissolving the sandwiched oxide layer using hydrofluoric acid solution (HF/H2O). Due to the atomic disorder in the structure of a-Si, the rate of molecular diffusion inside the a-Si film and etching of the oxide layer is not uniform over the film; thus, certain over-susceptible spots for etchant infiltration starts to locally detach. Using an in situ optical microscope, initially the detached region is observed to be buckled as a circular dome-shaped protuberance, which then forms wrinkles around the rim of the a-Si bubble. Around the rim, the deformation pattern was strongly dependant on the thickness h of the film, where the number of facets in the engendered petal-like patterns decreased with the increasing h. The tension-induced wrinkling in a-Si membranes was analytically and semi-quantitatively examined, and we conclude that the formation of peripheral corrugation is primarily due to the upward stretching force exerted by the underlying droplet composed of etchant and etching byproducts. The understanding of the elastic instability in ultrathin membranes could be extended to direct measurement of the fundamental properties in mechanically inferior systems.

Graphical abstract: Wrinkling evolution of a growing bubble: the wonders of petal-like patterns in amorphous silicon membranes

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Article information

DOI
https://doi.org/10.1039/C003293J
Article type
Paper
Submitted
17 Feb 2010
Accepted
25 Mar 2010
First published
17 May 2010

Soft Matter, 2010,6, 3249-3256

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Wrinkling evolution of a growing bubble: the wonders of petal-like patterns in amorphous silicon membranes

K. Lee, S. Lee, D. Khang and T. Lee, Soft Matter, 2010, 6, 3249 DOI: 10.1039/C003293J

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