Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates

Biao Wang; Xinyu Liu; Hongmin Liu; Dexin Wu; Huaping Wang; Jianming Jiang; Xianbao Wang; Ping-an Hu; Yunqi Liu; Daoben Zhu

doi:10.1039/B301061A

Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates

Biao Wang,^ac Xinyu Liu,^b Hongmin Liu,^b Dexin Wu,^b Huaping Wang,^c Jianming Jiang,^c Xianbao Wang,^a Ping-an Hu,^a Yunqi Liu*^a and Daoben Zhu*^a

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* Corresponding authors

^a Center for Molecular Science, Institute of Chemistry, Chinese Academy of Sciences, Beijing 100080, China
E-mail: liuyq@iccas.ac.cn

^b Microelectronics R&D Center, Chinese Academy of Sciences, Beijing 100080, China

^c College of Materials Science and Engineering, Donghua University, Shanghai 200051, China

Abstract

Patterns and alignment of carbon nanotubes (CNTs) are particularly important for fabricating functional devices such as field emitters, scanning probes, sensors, and nanoelectronics. In this paper, the effects of various metal substrates on CNT growth are studied. Depending on the different growth mechanisms associated with the various substrate surfaces, two- or three-dimensional micropatterns of aligned carbon nanotubes have been prepared via pyrolysis of iron(II) phthalocyanine. Patterns created on silicon substrates were obtained by photolithographic techniques. The prepared CNT patterns have resolutions down to the micrometer scale. Possible growth mechanisms of aligned carbon nanotubes on different metal surfaces are also discussed.

Journal of Materials Chemistry

Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates

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Controllable preparation of patterns of aligned carbon nanotubes on metals and metal-coated silicon substrates

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