Issue 3, 1999
From the journal:

Journal of Analytical Atomic Spectrometry

Thin film X-ray microanalysis with the analytical electron microscope

Aldo Armigliato  

Abstract

X-ray microanalysis, when performed in an analytical electron microscope (AEM) equipped with an energy dispersive spectrometer (EDS), is a powerful technique for determining chemical composition at high spatial resolution.The basic aspects of the generation and detection of X-rays will be reviewed and the problem of quantification of thin films (composition and thickness) will be discussed.

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Article information

DOI
https://doi.org/10.1039/A806757K
Article type
Paper

J. Anal. At. Spectrom., 1999,14, 413-418

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Thin film X-ray microanalysis with the analytical electron microscope

A. Armigliato, J. Anal. At. Spectrom., 1999, 14, 413 DOI: 10.1039/A806757K

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