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Investigation of the structure of damage layers in TEM samples prepared using a focused ion beam

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Journal of Materials Science Letters

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Authors and Affiliations

  1. Electron Microscope Unit, University of New South Wales, Sydney, 2052, Australia

    S. Rubanov

  2. Electron Microscope Unit, University of New South Wales, Sydney, 2052, Australia

    P. R. Munroe

Authors
  1. S. Rubanov
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  2. P. R. Munroe
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Rubanov, S., Munroe, P.R. Investigation of the structure of damage layers in TEM samples prepared using a focused ion beam. Journal of Materials Science Letters 20, 1181–1183 (2001). https://doi.org/10.1023/A:1010950201525

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  • DOI: https://doi.org/10.1023/A:1010950201525

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