Elsevier

Sensors and Actuators B: Chemical

Volume 204, 1 December 2014, Pages 407-413
Sensors and Actuators B: Chemical

Improved semiconducting CuO/CuFe2O4 nanostructured thin films for CO2 gas sensing

https://doi.org/10.1016/j.snb.2014.07.088Get rights and content

Highlights

  • Thin films were deposited by sputtering from a CuFeO2 target.

  • Self-organized p-CuO/n-CuFe2O4 bilayer could be obtained by a two steps process.

  • This nanostructured bilayer was sensitive to 5000 ppm CO2.

  • Measurement temperature, thickness and microstructure of the film were optimized.

  • A response between 45% and 50% could be obtained with Ag as additive.

Abstract

Promising results on the behavior of CuO/CuFe2O4 sputtered thin films as a sensing material under carbon dioxide atmospheres are presented in this article. More specifically, we report the effects of preparation parameters and microstructure of the sensing layer on the response to CO2. FEG-SEM images and XPS measurements revealed the two-stacked layers rearrangement of samples after air annealing as a key parameter in gas sensing test. The influence of the sensing layer thickness and the influence of Ag as an additive in the film on the response are also reported. The best response was obtained at the optimal operating temperature of 250 °C with a thin film deposited under low argon pressure and low target-to-substrate distance, reaching 40% towards 5000 ppm of CO2.

Introduction

Semiconductor nanocomposites with p–n junction were reported in the literature as the most performing materials for gas sensing regarding operating temperature and response. Ishihara et al. [1] introduced the CO2 gas sensing using a composite oxide/BaTiO3 junction. Several studies were performed on the comparison of different oxides combined with BaTiO3 such as PbO, MgO, CaO, NiO or CuO [1]. As a result, CuO/BaTiO3 exhibited the highest response to CO2 with a relatively low operating temperature in comparison with other oxides. Other groups replaced the perovskite phase by either another perovskite phase [2] or other oxides having rutile structure [3], [4]. From then on, several research groups worked on this composite [5], [6], [7], [8] by changing the way of elaborating this material. Indeed, many studies have been carried out on thin [5], [9], [10] and thick films [1], [6], [8], [11]. Thin films show higher repeatability in fabrication process, better control on fabrication parameters and better conditions in mass production, which allows lower costs than thick film techniques. In this work, radio-frequency (RF) sputtered CuO/CuFe2O4 semiconductor thin films are used as sensitive material. It has been already demonstrated [12] that the CuO/CuFe2O4 composite was sensitive to CO2.

In the present work, some of the key aspects concerning the electric response under CO2 of CuO/CuFe2O4 thin-films are correlated with the microstructure characterization thanks to scanning and transmission electron microscopy and X-ray photoelectron spectroscopy analyses. The effects of preparation parameters, microstructure, as well as the influence of silver doping on the sensitivity of the CO2 sensor are also described.

Section snippets

Preparation of the gas sensitive elements

Thin films were deposited by RF-sputtering technique using a CuFeO2 ceramic target according to the preparation described by Chapelle et al. [13]. Thickness calibrations were performed with a Dektak 3030ST profilometer. Process parameters for the as-deposited samples are given in Table 1. In order to obtain the CuO/CuFe2O4 nanocomposite, the as-deposited films were annealed at 450 °C in air for 12 h. After heat treatment, gold interdigitated electrodes were deposited on the surface by direct

Importance of the two-stacked sensitive layers architecture: the key role of the elaboration process

The microstructure of the CuO/CuFe2O4 composite has been detailed previously [15] by the present authors. This material can be described as a self-organized bi-layered architecture made of a thin CuO porous cover layer on the top of a thicker CuFe2O4 heart layer. Due to their specific self-organization in p- and n-type layers, such films prepared by simple air annealing on as-deposited samples, exhibited significant response to CO2 [12]. X-ray diffraction studies have shown that as-deposited

Conclusion

Thin films were deposited by RF-sputtering from a CuFeO2 target varying argon pressure and target-to-substrate distance. The sensing layer was obtained after an air annealing for 12 h at 450 °C. Self-organization of the sample after air annealing induced a p-CuO/n-CuFe2O4 bilayer structure. GD-OES experiments confirm that the CuO/CuFe2O4 bi-layer structure is obtained on film deposited with P0.5d5 conditions and for thicknesses of 50 nm measured in the as-deposited state. This latter film was

A. Chapelle received her MSc in materials for energy storage and conversion from University Paul Sabatier of Toulouse in 2008. She obtained her PhD degree in 2012 from CIRIMAT laboratory, Toulouse, France. Her research is now focused on metal oxide sensors in LAAS-CNRS laboratory, Toulouse, France.

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      Reducing the film thickness to a certain range can accelerate the response-recovery speed. The formation and decomposition of metallic carbonate are considered to be the cause of reversible reactions in the sensing mechanism [113–116], which was used by Chapelle et al. to explain the gas sensing mechanism of CuO/CuFe2O4 film for CO2 [117]. The same research group found a logarithmic relationship between the detection sensitivity of CuO/BaTiO3 and the volume concentration of CO2 at room temperature [118].

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    A. Chapelle received her MSc in materials for energy storage and conversion from University Paul Sabatier of Toulouse in 2008. She obtained her PhD degree in 2012 from CIRIMAT laboratory, Toulouse, France. Her research is now focused on metal oxide sensors in LAAS-CNRS laboratory, Toulouse, France.

    I. El Younsi obtained her master's degree in materials engineering: thin metal layers from University of Strasbourg in 2012. She is currently pursuing her PhD degree on preparation and characterization of new sensitive layers for CO2 gas sensors in CIRIMAT laboratory at Paul Sabatier University, Toulouse, France.

    S. Vitale obtained her MSc in materials chemistry at the University of Catania (Italy) in 2011. She has worked for two years (2012–2013) at the Bern University of Applied Sciences (Switzerland), were she was involved in multilayered materials characterization by GDOES. She is currently PhD student at the Department of Chemical Sciences of the University of Catania, in LAMSUN laboratory, where she is working on surface engineering via molecular self-assembly for nanotechnology applications.

    Y. Thimont is an assistant professor at the CIRIMAT laboratory (Toulouse-France) since September 2013. He received his PhD degree in chemistry of materials at the University de Caen Basse-Normandie (France) in 2009 for YBa2Cu3O7 thin films depositions and characterization. He held a nine month post-doctoral position based on the study and the deposition of TCO thin films at the LRCS laboratory (Amiens-France). He then returns to Caen as temporary teacher and researcher in superconductor thematic for two years then held another post-doctoral position at Caen for one year which devoted to the synthesis and characterization of thermoelectric silicides. His research interests include the thin films synthesis and topographic, electrical, magnetic and optical characterizations.

    T. Nelis received his PhD degree for work on free radical spectroscopy in Bonn, Germany. Since then he has worked several years for major scientific instrument manufactures in the field of glow discharge emission spectroscopy. Since 2011, he is professor for physics at the Bern University of Applied Sciences in Biel Switzerland. His current field of research is plasma processes for thin film deposition and surface modification.

    L. Presmanes received his PhD degree, for his thesis-work on ferrite thin films for magneto-optical storage. Since 1997, he has been working in CIRIMAT laboratory at University Paul Sabatier (Toulouse) and he is also CNRS researcher since 2001. His research interests are focused on the preparation of sputtered oxide and nano-composites thin films and the study of their microstructure as well as their electrical, magnetic and optical properties. He developed sputtered ferrite thin films to be integrated as sensitive layers in magneto-optical disks and micro-bolometers (IR sensors). His work is currently focused on transparent conducting oxides and semiconductor sensitive layers for gas sensors.

    A. Barnabé is a professor at the CIRIMAT laboratory, Paul Sabatier University, France. He received his PhD degree in chemistry of materials from University de Caen-Basse Normandie (France) in 1999. He held a post-doctoral position in Northwestern University, Evanston (USA), in 2000. His current research interests are mainly focused in functional metal oxide powders, ceramics and thin films prepared by PVD technique.

    P. Tailhades received his PhD degree in material science in 1988 and the Habilitation à Diriger les Recherches in 1994. He is currently the vice director of the Centre Interuniversitaire de Recherche et d’Ingénierie des Matériaux (CIRIMAT), Toulouse, France. His research interests include the preparation of original metallic oxides, especially spinel ferrites, in the form of fine powders, thin films, or bulk ceramics and the study of their magnetic, electric, and optical properties. He also works on the preparation of special metallic powders. He received the silver medal of CNRS in France in 2000.

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