Hydroxyapatite (HA) films were deposited using dual ion beam sputtering. Deposition was carried out with an in situ heat treatment at three temperature settings during deposition. X-ray diffraction of the films at the surface revealed that the deposited film is composed of hydroxyapatite crystalline and amorphous phases. Cross-sectional transmission electron microscopy analysis displayed that the films have a graded crystal structure with the crystalline layer near the substrate and the amorphous layer at the top surface. Compositional analysis was performed using SEM-EDX at the top surface as well as STEM-EDX at the cross-section of the film. The average calcium to phosphorous ratio at the surface is 1.46, obtained by SEM-EDX. The Ca/P ratios in the crystalline and amorphous layers of the film are 1.6 to 1.7, close to the ratio of 1.67 for HA.
