Section VII. Sputtering and SIMSStatistics of sputtering
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2020, Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and AtomsCitation Excerpt :As a mandatory condition for ACM the number of atoms ejected from one sputtering cascade caused by a single bombarding ion must be sufficiently large to enable the formation of a trimer by atomic combination. From Monte Carlo calculations the number ν of sputtered atoms per collision cascade shows a broad distribution which can be approached by a Poisson distribution for low projectile energies [18]. When referring again to Cu with a sputtering yield YCu = 3.6 atoms/ion for normal bombardment with Ar+- ions around 1 keV [19] as the average number of Cu-atoms sputtered per incident ion, the probability PCu(ν) for the co-emission of ν atoms can be easily calculated.
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