Characterization of a cantilever with an integrated deflection sensor
References (13)
- et al.
Plasma etching for micromechanical sensor applications
Microelectron. Eng.
(1994) Sharp silicon tips for AFM and field emission
Microelectron. Eng.
(1994)Atomic force microscopy
Surf. Sci.
(1992)- et al.
Atomic force microscope
Phys. Rev. Lett.
(1986) - et al.
Improved fiber-optic interferometer for atomic force microscopy
Appl. Phys. Lett.
(1989) Scanning force microscopy using a simple low-noise interferometer
Appl. Phys. Lett.
(1989)
Cited by (70)
Integration of silver nanowires into SU-8 hollow cantilevers for piezoresistive-based sensing
2020, Sensors and Actuators, A: PhysicalCitation Excerpt :Piezoresistive readout (i.e. measurement of the resistance change induced by the applied mechanical strain) represents an attractive alternative to OBD since it is relatively undemanding to be implemented in the microfabrication process [20]. The first piezoresistive cantilevers were used for AFM imaging with impressive resolution [18,19], and a low noise-level of 0.3 Å could be achieved in a comparative study between OBD and piezoresistive readouts [21]. Moreover, piezoresistive readout has been successfully applied for probe arrays to enlarge image size and data acquisition speed substantially improving measurement statistics [22,23].
Soft piezoresistive cantilevers for adhesion force measurements
2020, Sensors and Actuators, A: PhysicalCitation Excerpt :Moreover application of the OBD technique may be difficult in some applications because of the complexity and size of the optical system. The most typical solution for the piezoresistive cantilever deflection sensing is to fabricate four strain sensing piezoresistors forming a complete Wheatstone bridge circuit at the strain concentration area [11]. However to simplify the cantilever structure and to allow to reduce its size the cantilevers with single piezoresistor can be manufactured as well.
Thermal nanometrology using piezoresistive SThM probes with metallic tips
2018, UltramicroscopyCitation Excerpt :This combination of 3D photolithography and FIB post-processing allows to manufacture the resistive tip with radius of curvature below 100 nm (Fig. 3). Piezoresistive sensor located at the base of the cantilever shown (Fig. 4a), is a replacement for a complicated system of deflection optical laser beam (OBD) [10]. Diffused p-type piezoresistors in silicon cantilever are in Wheatstone bridge configuration (Fig. 4b).
Tip-based nanolithography methods and materials
2016, Frontiers of NanosciencePiezoresistive cantilevers for nanomechanical sensing
2015, Microelectronic EngineeringCitation Excerpt :They achieved atomic resolution (0.1 Å in the bandwidth 10 Hz–1 kHz) and demonstrated atomic corrugation images in layered materials such as graphite, boron nitride or TaSe2. Soon after that, Linnemann et al. fabricated piezoresistive cantilevers for AFM, in which a complete Wheatstone bridge was integrated in each cantilever [68,87]. The cantilevers were relatively big (1000 μm × 220 μm × 20 μm) and they demonstrated topographical images of structured (50 nm–1 μm) surfaces.
Review of scanning probe micromachining and its applications within nanoscience
2014, Microelectronic EngineeringCitation Excerpt :In contrast to the piezoelectric effect, the piezoresistive effect only causes a change in electrical resistivity, it does not produce electric potential. In this technology, resistors are created by local doping of a single crystal silicon cantilever [22,55–61,62]. However, doped polycrystalline silicon cantilevers that exhibited excellent piezoresistivity have also been created [63,64].