Elsevier

Thin Solid Films

Volume 182, Issues 1–2, 20 December 1989, Pages 79-86
Thin Solid Films

Electronics and optics
Sputtered electrochromic V2O5 films

https://doi.org/10.1016/0040-6090(89)90245-9Get rights and content

Abstract

Vanadium oxide films were deposited by reactive d.c. magnetron sputtering from a vanadium target in argon-oxygen gas mixtures. The composition and structure of these films were investigated by X-ray photoelectron spectroscopy and X-ray diffraction. Films with the approximate composition V2O5 were amorphous when deposited at room temperature and had a reversible color change when lithium was electrochemically injected. Because the color change is slight, these films could be used as a counterelectrode to a more strongly coloring material.

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