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Microstructure-based high-quality factor terahertz metamaterial bio-detection sensor

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Abstract

The sensitivity, accuracy, and stability of terahertz biodetection functional devices still need to be improved. A metamaterial-based terahertz biodetection sensor was to be designed and fabricated to meet this need. The sensor uses lithography and magnetron sputtering processes to prepare copper combination square ring microstructures. The sensor interacts with the incident terahertz wave to generate a magnetic dipole resonance, including a resonant peak with 98.9% absorption at the resonant frequency of 0.4696 THz. When the analyte’s refractive index increased from 1.0 to 2.0, the resonance peak of the sensor obviously redshifted, and the absorption of the resonance peak almost exceeded 99%. Meanwhile, the sensitivity of the sensor can reach 78.6 GHz/RIU (refractive index unit, RIU), Q (quality factor) is up to 55.3, and FOM (figure of merit, FOM) is up to 9.81. In addition, the quadruple rotation structure unit makes the sensor insensitive to wide incidence angles and polarization. The designed sensor has excellent resonance characteristics and can realize the detection and identification of biomolecules with different refractive indices. It also provides new ideas for designing terahertz band bio-detection sensors and has critical applications in medical diagnosis and real-time monitoring.

Graphical Abstract

A terahertz metamaterial biodetection sensor was designed and prepared by introducing a quadruple rotationally symmetric microstructure. When the refractive index of the analyte injected into the sensor increases in the range of 1.0 to 2.0, the resonant peak of the sensor undergoes a significant redshift. Meanwhile, the sensitivity of the sensor can reach 78.6 GHz/RIU, the Q factor can reach 55.3, and the FOM can reach 9.81.

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Funding

This work was supported by the National Natural Science Foundation of China (No. 52175555), the Top young and middle-aged innovative talents in Shanxi Colleges and universities, the Shanxi key research and development project (international cooperation) (No. 201803D421043), the fund for Shanxi “1331 Project” Key Subject Construction, the National Natural Science Foundation of China (innovation community) (No. 51821003), the Fundamental Research Program of Shanxi Province (No. 20210302123074), and the Fundamental Research Program of Shanxi Province (No.202203021212146).

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Authors and Affiliations

  1. Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan, 030051, China

    Zeng Qu, Jinfeng Kang, Wei Li, Boyi Yao, Hao Deng, Yiqing Wei, Huihui Jing, Xiaohong Li, Junping Duan & Binzhen Zhang

  2. School of Electrical and Control Engineering, North University of China, Taiyuan, 030051, China

    Zeng Qu

  3. School of Instrument and Electronics, North University of China, Taiyuan, 030051, China

    Jinfeng Kang, Wei Li, Boyi Yao, Hao Deng, Yiqing Wei, Huihui Jing, Xiaohong Li, Junping Duan & Binzhen Zhang

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Contributions

Zeng Qu and Jinfeng Kang prepared the main manuscript. Wei Li and Boyi Yao processed the data in Figs. 1, 2, and 3. Hao Deng and Yiqing Wei processed the data in Figs. 5, 6, 7, 8 and S1. Huihui Jing, Xiaohong Li, Junping Duan, and Binzhen Zhang did the chip process and proofreading, and all authors reviewed the manuscript.

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Qu, Z., Kang, J., Li, W. et al. Microstructure-based high-quality factor terahertz metamaterial bio-detection sensor. Adv Compos Hybrid Mater 6, 100 (2023). https://doi.org/10.1007/s42114-023-00679-4

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