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Investigation of micro-abrasion characteristics of thin metallic coatings by in-situ SEM scratch test

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Abstract

The aim of this study was to elucidate the micro-abrasion characteristics of thin metallic coatings through in-situ visualization of the scratch formation process. Pure silver (Ag), pure copper (Cu), and Ag/Cu composite coatings with thicknesses of a few hundred nanometers were deposited on silicon substrates using a magnetron sputtering system. A custom-built pin-on-reciprocator-type tribotester installed inside of a scanning electron microscope (SEM) was utilized to perform the experiments. A single crystal diamond tip was used as the tool in order to represent a hard single asperity. Micro-abrasion mechanisms of the three different coatings were compared by analyzing the friction and scratch characteristics. The friction force measured during the scratch test was directly correlated with the micro-abrasion mechanism. It was found that different chemical and mechanical properties of the coatings led to the formation of different amounts of debris and burrs. Depending on the type of coating, different micro-abrasion mechanisms could be identified.

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References

  1. Luechinger, N. A., Athanassiou, E. K., and Stark, W. J., “Graphene-Stabilized Copper Nanoparticles as an Air-Stable Substitute for Silver and Gold in Low-Cost Ink-Jet Printable Electronics,” Nanotechnology, Vol. 19, No. 44, Paper No. 445201, 2008.

    Article  Google Scholar 

  2. Grouchko, M., Kamyshny, A., and Magdassi, S., “Formation of Air-Stable Copper-Silver Core-Shell Nanoparticles for Inkjet Printing,” Journal of Materials Chemistry, Vol. 19, No. 19, pp. 3057–3062, 2009.

    Article  Google Scholar 

  3. Au, M., He, Y., Zhao, Y., Ghassemi, H., Yassar, R. S., et al., “Silicon and Silicon-Copper Composite Nanorods for Anodes of Li-Ion Rechargeable Batteries,” Journal of Power Sources, Vol. 196, No. 22, pp. 9640–9647, 2011.

    Article  Google Scholar 

  4. Yen, J.-P., Chang, C.-C., Lin, Y.-R., Shen, S.-T., and Hong, J.-L., “Sputtered Copper Coating on Silicon/Graphite Composite Anode for Lithium Ion Batteries,” Journal of Alloys and Compounds, Vol. 598, pp. 184–190, 2014.

    Article  Google Scholar 

  5. Ho, L.-N. and Nishikawa, H., “Copper-Filled Electrically Conductive Adhesives with Enhanced Shear Strength,” Journal of Materials Engineering and Performance, Vol. 23, No. 9, pp. 3371–3378, 2014.

    Article  Google Scholar 

  6. Yu, J. H., Rho, Y., Kang, H., Jung, H. S., and Kang, K.-T., “Electrical Behavior of Laser-Sintered Cu Based Metal-Organic Decomposition Ink in Air Environment and Application as Current Collectors in Supercapacitor,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 2, No. 4, pp. 333–337, 2015.

    Article  Google Scholar 

  7. Oleszek, S., Grabda, M., Shibata, E., and Nakamura, T., “Distribution of Copper, Silver and Gold during Thermal Treatment with Brominated Flame Retardants,” Waste Management, Vol. 33, No. 9, pp. 1835–1842, 2013.

    Article  Google Scholar 

  8. Sharma, M. K., Buchner, R. D., Scharmach, W. J., Papavassiliou, V., and Swihart, M. T., “Creating Conductive Copper-Silver Bimetallic Nanostructured Coatings using a High Temperature Reducing Jet Aerosol Reactor,” Aerosol Science and Technology, Vol. 47, No. 8, pp. 858–866, 2013.

    Article  Google Scholar 

  9. Vollertsen, F. and Schmidt, F., “Dry Metal Forming: Definition, Chances and Challenges,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 1, pp. 59–62, 2014.

    Article  Google Scholar 

  10. Song, J. and Schinow, V., “Correlation between Friction and Wear Properties and Electrical Performance of Silver Coated Electrical Connectors,” Wear, Vols. 330-331, pp. 400–405, 2015.

    Article  Google Scholar 

  11. Borchers, C., Gärtner, F., Stoltenhoff, T., Assadi, H., and Kreye, H., “Microstructural and Macroscopic Properties of Cold Sprayed Copper Coatings,” Journal of Applied Physics, Vol. 93, No. 12, pp. 10064–10070, 2003.

    Article  Google Scholar 

  12. He, H.-B., Han, W.-Q., Li, H.-Y., Li, D.-Y., Yang, J., et al., “Effect of Deep Cryogenic Treatment on Machinability and Wear Mechanism of TiAlN Coated Tools during Dry Turning,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 4, pp. 655–660, 2014.

    Article  Google Scholar 

  13. Li, H.-Y., He, H.-B., Han, W.-Q., Yang, J., Gu, T., et al., “A Study on Cutting and Tribology Performances of TiN and TiAlN Coated Tools,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 4, pp. 781–786, 2015.

    Article  Google Scholar 

  14. Lin, L.-Y. and Kim, D.-E., “Tribological Properties of Polymer/Silica Composite Coatings for Microsystems Applications,” Tribology International, Vol. 44, No. 12, pp. 1926–1931, 2011.

    Article  Google Scholar 

  15. Penkov, O. V., Lee, D.-H., Kim, H., and Kim, D.-E., “Frictional Behavior of Atmospheric Plasma Jet Deposited Carbon-ZnO Composite Coatings,” Composites Science and Technology, Vol. 77, pp. 60–66, 2013.

    Article  Google Scholar 

  16. Thangavel, E., Ramasundaram, S., Pitchaimuthu, S., Hong, S. W., Lee, S. Y., et al., “Structural and Tribological Characteristics of Poly (Vinylidene Fluoride)/Functionalized Graphene Oxide Nanocomposite Thin Films,” Composites Science and Technology, Vol. 90, pp. 187–192, 2014.

    Article  Google Scholar 

  17. Penkov, O. V., Pukha, V. E., Devizenko, A. Y., Kim, H.-J., and Kim, D.-E., “Self-Healing Phenomenon and Dynamic Hardness of C60-Based Nanocomposite Coatings,” Nano Letters, Vol. 14, No. 5, pp. 2536–2540, 2014.

    Article  Google Scholar 

  18. Ryu, B.-H., Barthel, A. J., Kim, H.-J., Lee, H.-D., Penkov, O. V., et al., “Tribological Properties of Carbon Nanotube-Polyethylene Oxide Composite Coatings,” Composites Science and Technology, Vol. 101, pp. 102–109, 2014.

    Article  Google Scholar 

  19. Hong, S., Bae, J., Koo, B., Chang, I., Cho, G. Y., et al., “Nanostructuring Methods for Enhancing Light Absorption Rate of Si-based Photovoltaic Devices: A Review,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 1, pp. 67–74, 2014.

    Article  Google Scholar 

  20. Penkov, O. V., Bugayev, Y. A., Zhuravel, I., Kondratenko, V. V., Amanov, A., and Kim, D.-E., “Friction and Wear Characteristics of C/Si Bi-Layer Coatings Deposited on Silicon Substrate by DCMagnetron Sputtering,” Tribology Letters, Vol. 48, No. 2, pp. 123–131, 2012.

    Article  Google Scholar 

  21. Hong, S., Bae, J., Koo, B., Chang, I., Cho, G. Y., et al., “Nanostructuring Methods for Enhancing Light Absorption Rate of Si-Based Photovoltaic Devices: A Review,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 1, pp. 67–74, 2014.

    Article  Google Scholar 

  22. Yang, S., Kim, H., Pawar, R. C., Ahn, S.-H., and Lee, C. S., “Dielectric Characteristics of a Barium Titanate Film Deposited by Nano Particle Deposition System (NPDS),” Int. J. Precis. Eng. Manuf., Vol. 16, No. 5, pp. 1029–1034, 2015.

    Article  Google Scholar 

  23. Yao, C., Chen, W., Zhu, T., Tay, S. L., and Gao, W., “A Study on Corrosion Behaviour of Magnetron Sputtered Zn-Mg Coating Deposited onto Electro-Galvanized Steel,” Surface and Coatings Technology, Vol. 249, pp. 90–96, 2014.

    Article  Google Scholar 

  24. Sahoo, P. and Das, S. K., “Tribology of Electroless Nickel Coatings-A Review,” Materials & Design, Vol. 32, No. 4, pp. 1760–1775, 2011.

    Article  Google Scholar 

  25. Koch, C. C., “Intermetallic Matrix Composites Prepared by Mechanical Alloying-A Review,” Materials Science and Engineering: A, Vol. 244, No. 1, pp. 39–48, 1998.

    Article  Google Scholar 

  26. Wu, Z., Bei, H., Otto, F., Pharr, G. M., and George, E. P., “Recovery, Recrystallization, Grain Growth and Phase Stability of a Family of FCC-Structured Multi-Component Equiatomic Solid Solution Alloys,” Intermetallics, Vol. 46, No. pp. 131–140, 2014.

    Article  Google Scholar 

  27. Lee, S.-H., Kim, C.-K., Shim, H.-S., Yoo, J.-H., Russo, R. E., and Jeong, S., “Ablation and Spectroscopic Characteristics of Thin CuIn1-x GaxSe2 Solar Cell Films Fabricated by Co-Evaporation and Co-Sputtering Processes,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 1, No. 1, pp. 17–24, 2014.

    Article  Google Scholar 

  28. Piao, Z.-Y., Xu, B.-S., Wang, H.-D., and Wen, D.-H., “Investigation of Acoustic Emission Source of Fe-based Sprayed Coating under Rolling Contact,” International Journal of Fatigue, Vol. 47, No. pp. 184–188, 2013.

    Article  Google Scholar 

  29. Raza, S. W., Pervaiz, S., and Deiab, I., “Tool Wear Patterns When Turning of Titanium Alloy using Sustainable Lubrication Strategies,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 9, pp. 1979–1985, 2014.

    Article  Google Scholar 

  30. Penkov, O., Kim, H.-J., Kim, H.-J., and Kim, D.-E., “Tribology of Graphene: A Review,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 3, pp. 577–585, 2014.

    Article  Google Scholar 

  31. Kang, K. H., Penkov, O. V., Kim, H.-J., and Kim, D.-E., “Effectiveness of Bubble Structure in Contact Damage Reduction of Au Film,” Tribology International, Vol. 55, pp. 40–45, 2012.

    Article  Google Scholar 

  32. Amanov, A., Penkov, O. V., Pyun, Y.-S., and Kim, D.-E., “Effects of Ultrasonic Nanocrystalline Surface Modification on the Tribological Properties of AZ91D Magnesium Alloy,” Tribology International, Vol. 54, No. pp. 106–113, 2012.

    Article  Google Scholar 

  33. He, M., Lee, S., and Yeo, C.-D., “Investigating Atomic Structure of Thin Carbon Film under Mechanical Stress and Frictional Heat Generation,” Surface and Coatings Technology, Vol. 261, pp. 79–85, 2015.

    Article  Google Scholar 

  34. Kim, K.-I., Kim, C.-L., and Kim, D.-E., “Characterization of Durability of Coatings for Cell Phone Cover by Wear, Erosion, and Pull-Off Tests,” Int. J. Precis. Eng. Manuf., Vol. 13, No. 9, pp. 1633–1639, 2012.

    Article  Google Scholar 

  35. Wang, C.-Y., Chen, Y.-H., An, Q.-L., Cai, X.-J., Ming, W.-W., and Chen, M., “Drilling Temperature and Hole Quality in Drilling of CFRP/Aluminum Stacks using Diamond Coated Drill,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 8, pp. 1689–1697, 2015.

    Article  Google Scholar 

  36. Merklein, M., Andreas, K., and Steiner, J., “Influence of Tool Surface on Tribological Conditions in Conventional and Dry Sheet Metal Forming,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 2, No. 2, pp. 131–137, 2015.

    Article  Google Scholar 

  37. Dureja, J. S., Singh, R., Singh, T., Singh, P., Dogra, M., and Bhatti, M. S., “Performance Evaluation of Coated Carbide Tool in Machining of Stainless Steel (AISI 202) Under Minimum Quantity Lubrication (MQL),” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 2, No. 2, pp. 123–129, 2015.

    Article  Google Scholar 

  38. Merklein, M., Andreas, K., and Steiner, J., “Influence of Tool Surface on Tribological Conditions in Conventional and Dry Sheet Metal Forming,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 2, No. 2, pp. 131–137, 2015.

    Article  Google Scholar 

  39. Yoo, S.-S. and Kim, D.-E., “Vapor Phase Lubrication using High Molecular Weight Lubricant for Friction Reduction of Metals,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 5, pp. 867–873, 2014.

    Article  MathSciNet  Google Scholar 

  40. Park, N.-R. and Ahn, D.-G., “A Study on the Effects of Hardfacing Thickness on Wear Characteristics of Stellite21 Hardfaced STD61 Hotworking Tool Steel at the Elevated Temperature,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 5, pp. 941–944, 2014.

    Article  Google Scholar 

  41. Lee, S. H., Yoo, S. S., Kim, D. E., Kang, B. S., and Kim, H. E., “Accelerated Wear Test of FKM Elastomer for Life Prediction of Seals,” Polymer Testing, Vol. 31, No. 8, pp. 993–1000, 2012.

    Article  Google Scholar 

  42. Wang, C.-D., Chen, M., An, Q.-L., Wang, M., and Zhu, Y.-H., “Tool Wear Performance in Face Milling Inconel 182 using Minimum Quantity Lubrication with Different Nozzle Positions,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 3, pp. 557–565, 2014.

    Article  Google Scholar 

  43. Kayaba, T., Hokkirigawa, K., and Kato, K., “Analysis of the Abrasive Wear Mechanism by Successive Observations of Wear Processes in a Scanning Electron Microscope,” Wear, Vol. 110, No. 3, pp. 419–430, 1986.

    Article  Google Scholar 

  44. Kato, K., “Micro-Mechanisms of Wear-Wear Modes,” Wear, Vol. 153, No. 1, pp. 277–295, 1992.

    Article  Google Scholar 

  45. Wang, D. F. and Kato, K., “In Situ Examination of Wear Particle Generation in Carbon Nitride Coatings by Repeated Sliding Contact against a Spherical Diamond,” Wear, Vol. 253, No. 5-6, pp. 519–526, 2002.

    Article  Google Scholar 

  46. Murarash, B. and Varenberg, M., “Tribometer for in Situ Scanning Electron Microscopy of Microstructured Contacts,” Tribology Letters, Vol. 41, No. 2, pp. 319–323, 2011.

    Article  Google Scholar 

  47. Heinrichs, J., Olsson, M., Jenei, I. Z., and Jacobson, S., “Transfer of Titanium in Sliding Contacts-New Discoveries and Insights Revealed by in Situ Studies in the SEM,” Wear, Vol. 315, No. 1, pp. 87–94, 2014.

    Article  Google Scholar 

  48. Liu, Z., Zhu, L., Lin, J., and Sun, Z. H., “Gas Barrier Properties of SiOx Films Deposited by RFMagnetron Co-Sputtering,” Advanced Materials Research, Vols. 284-286, pp. 48–52, 2011.

    Article  Google Scholar 

  49. Lee, H.-D., Penkov, O. V., and Kim, D.-E., “Tribological Behavior of Dual-Layer Electroless-Plated Ag–Carbon Nanotube Coatings,” Thin Solid Films, Vol. 534, pp. 410–416, 2013.

    Article  Google Scholar 

  50. Gao, X.-Y., Wang, S.-Y., Li, J., Zheng, Y.-X., Zhang, R.-J., et al., “Study of Structure and Optical Properties of Silver Oxide Films by Ellipsometry, XRD and XPS Methods,” Thin Solid Films, Vols. 455-456, pp. 438–442, 2004.

    Article  Google Scholar 

  51. Choi, H.-S., Kim, S.-G., Seo, P.-K., Kim, B.-M., Cha, B.-C., and Ko, D.-C., “Experimental Investigation on Galling Performance of Tool Steel in Stamping of UHSS Sheets,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 6, pp. 1101–1107, 2014.

    Article  Google Scholar 

  52. Afferrante, L., Carbone, G., and Demelio, G., “Interacting and Coalescing Hertzian Asperities: A New Multiasperity Contact Model,” Wear, Vols. 278-279, pp. 28–33, 2012.

    Article  Google Scholar 

  53. Zhou, Z. M., Zhou, Y., Yang, C. S., Chen, J. A., Ding, W., and Ding, G. F., “The Evaluation of Young's Modulus and Residual Stress of Copper Films by Microbridge Testing,” Sensors and Actuators A: Physical, Vol. 127, No. 2, pp. 392–397, 2006.

    Article  Google Scholar 

  54. Oganov, A. R. and Lyakhov, A. O., “Towards the Theory of Hardness of Materials,” Journal of Superhard Materials, Vol. 32, No. 3, pp. 143–147, 2010.

    Article  Google Scholar 

  55. Sakharova, N. A., Fernandes, J. V., Oliveira, M. C., and Antunes, J. M., “Influence of Ductile Interlayers on Mechanical Behaviour of Hard Coatings Under Depth-Sensing Indentation: A Numerical Study on Tialn,” Journal of Materials Science, Vol. 45, No. 14, pp. 3812–3823, 2010.

    Article  Google Scholar 

  56. Bayram, B., Akar, O., and Akin, T., “Plasma-Activated Direct Bonding of Diamond-on-Insulator Wafers to Thermal Oxide Grown Silicon Wafers,” Diamond and Related Materials, Vol. 19, No. 11, pp. 1431–1435, 2010.

    Article  Google Scholar 

  57. Meshi, L., Samuha, S., Cohen, S. R., Laikhtman, A., Moshkovich, A., et al., “Dislocation Structure and Hardness of Surface Layers under Friction of Copper in Different Lubricant Conditions,” Acta Materialia, Vol. 59, No. 1, pp. 342–348, 2011.

    Article  Google Scholar 

  58. Greaves, G. N., Greer, A. L., Lakes, R. S., and Rouxel, T., “Poisson's Ratio and Modern Materials,” Nature Materials, Vol. 10, No. 11, pp. 823–837, 2011.

    Article  Google Scholar 

  59. Field, J. E., “The Mechanical and Strength Properties of Diamond,” Reports on Progress in Physics, Vol. 75, No. 12, Paper No. 126505, 2012.

    Article  Google Scholar 

  60. Geng, X., Zhang, Z., Barthel, E., and Dalmas, D., “Mechanical Stability under Sliding Contact of Thin Silver Film Embedded in Brittle Multilayer,” Wear, Vol. 276, No. pp. 111–120, 2012.

    Article  Google Scholar 

  61. Jang, S., Jeong, H., Yuh, M., and Park, J., “Effect of Surfactant on Package Substrate in Chemical Mechanical Planarization,” Int. J. Precis. Eng. Manuf.-Green Tech., Vol. 2, No. 1, pp. 59–63, 2015.

    Article  Google Scholar 

  62. Armstrong, D. E. J., Wilkinson, A. J., and Roberts, S. G., “Micro-Mechanical Measurements of Fracture Toughness of Bismuth Embrittled Copper Grain Boundaries,” Philosophical Magazine Letters, Vol. 91, No. 6, pp. 394–400, 2011.

    Article  Google Scholar 

  63. Chee, C. Y. and Azmi, A., “Preparation and Characterization of Copper/Copper Coated Silicon Carbide Composites,” Int. J. Precis. Eng. Manuf., Vol. 15, No. 6, pp. 1215–1221, 2014.

    Article  Google Scholar 

  64. Kim, D.-E., Kim, C.-L., and Kim, H.-J., “A Novel Approach to Wear Reduction of Micro-Components by Synthesis of Carbon Nanotube-Silver Composite Coating,” CIRP Annals-Manufacturing Technology, Vol. 60, No. 1, pp. 599–602, 2011.

    Article  Google Scholar 

  65. Lee, H. and Jeong, H., “Analysis of Removal Mechanism on Oxide CMP using Mixed Abrasive Slurry,” Int. J. Precis. Eng. Manuf., Vol. 16, No. 3, pp. 603–607, 2015.

    Article  Google Scholar 

  66. Singer, I. L., Dvorak, S. D., Wahl, K. J., and Scharf, T. W., “Role of Third Bodies in Friction and Wear of Protective Coatings,” Journal of Vacuum Science & Technology A, Vol. 21, No. 5, pp. S232–S240, 2003.

    Article  Google Scholar 

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Kim, CL., Penkov, O.V., Shin, DG. et al. Investigation of micro-abrasion characteristics of thin metallic coatings by in-situ SEM scratch test. Int. J. Precis. Eng. Manuf. 17, 1139–1147 (2016). https://doi.org/10.1007/s12541-016-0138-1

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