Abstract
In micro pattern machining, rectangular channel structures having high aspect ratio can be easily deformed because the cutting force perpendicular to the moving direction of the diamond tool pushes the channel structure. In order to prevent such deformation, conservative cutting conditions that can reduce the cutting force are applied, but make great sacrifices in productivity. Therefore, it is necessary to study the deformation behavior of micro channels to determine optimum cutting conditions. This paper presents a theoretical prediction solution for the deformation of the micro rectangular channels. To obtain maximum principle stress and deflection of micro rectangular pattern, the used model was a cantilever beam with a distributed load. Furthermore, for verifying this solution, FEM analysis and experiments have been carried out to rectangular patterns by diamond machining. The maximum error between the predicted deformation and experimental deformation was approximately 5mm, which means that this prediction solution works well.
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Duong, TH., Kim, HC. Deformation analysis of rectangular channel structures in micro pattern machining. Int. J. Precis. Eng. Manuf. 16, 619–627 (2015). https://doi.org/10.1007/s12541-015-0083-4
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DOI: https://doi.org/10.1007/s12541-015-0083-4