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Effect of forming conditions on linear patterning of polymer materials by hot embossing process

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Abstract

In this work we demonstrate the hot-embossing process under different forming conditions such as forming temperature, load, and holding time in pressing, in order to determine the suitable conditions required for linear patterning on polymer plates (PMMA and PC). Results showed that the replicated pattern depth increased in proportion to an increase in the forming temperature, load, and time. The reduction of the workpiece thickness increased according to the holding time in the pressing process. In the process of time, the reduction ratio of the workpiece thickness decreased due to the surface area increment of the workpiece, while the pressure on the workpiece declined. In order to reduce the bulging ratio we introduced a temperature difference between the upper and the lower punch.

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References

  1. Hardt, D., Ganesan, B., Qi, W., Dirckx, M. and Rzepniewski, A., “Process Control in Micro-Embossing: A Review,” Innovation in Manufacturing Systems and Technology, 2004.

  2. Choi, C. G., “Fabrication of optical waveguides in thermosetting polymers using hot embossing,” J. Micromechanics and Microengineering, Vol. 14, No. 7, pp. 945–949, 2004.

    Article  Google Scholar 

  3. Kim, W. S., Yoon, K. B. and Bae, B. S., “Nanopatterning of photonic crystals with a photocurable silica-titania organicinorganic hybrid material by a UV-based nanoimprint technique,” J. Mater. Chem., Vol. 15, No. 42, pp. 4535–4539, 2005.

    Article  Google Scholar 

  4. Ishihara, K., Fujita, M., Matusubara, I., Asano, T. and Noda, S., “Direct Fabrication of Photonic Crystal on Glass Substrate by Nanoimprint Lithography,” Japanese Journal of Applied Physics, Vol. 45, No. 7, pp. 210–212, 2006.

    Article  Google Scholar 

  5. Kim, H.-J. and Kim, D.-E., “Nano-scale Friction: A Review,” Int. J. Prec. Eng. Manuf., Vol. 10, No. 2, pp. 141–151, 2009.

    Article  Google Scholar 

  6. Heidari, B., Maximov, I. and Montelius, L., “Nanoimprint lithography at the 6 in. wafer scale,” J. Vac. Sci. Technol. B, Vol. 18, No. 6, pp. 3557–3560, 2000.

    Article  Google Scholar 

  7. Cameron, N. S., Roberge, H., Veres, T., Jakeway, S. C. and Crabtree, H. J., “High fidelity, high yield production of microfluidic devices by hot embossing lithography: rheology and stiction,” Lab Chip, Vol. 6, No. 7, pp. 936–941, 2006.

    Article  Google Scholar 

  8. Chang, W.-S., Choi, M.-J., Kim, J.-G., Cho, S.-H. and Whang, K.-H., “Thin Film Micromachining Using Femtosecond Laser Photo Patterning of Organic Self-assembled Monolayers,” Int. J. Prec. Eng. Manuf., Vol. 7, No. 1, pp. 13–17, 2006.

    Google Scholar 

  9. Guo, L. J., “Recent Progress in nanoimprint technology and its application,” J. Phys. D: Applied Physics, Vol. 37, No. 11, pp. 123–141, 2004.

    Article  Google Scholar 

  10. Scheer, H. C. and Schulz, H., “A contribution to the flow behaviour of thin polymer films during hot embossing lithography,” Microelectronic Eng., Vol. 56, No. 3-4, pp. 311–332, 2001.

    Article  Google Scholar 

  11. Yao, D. and Virupaksha, V. L., “Study on Squeezing Flow During Nonisothermal Embossing of Polymer Microstructures,” Polymer eng. and Sci., Vol. 45, No. 5, pp. 652–660, 2005.

    Article  Google Scholar 

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Authors and Affiliations

  1. School of Mechanical Engineering, Graduate School, Pusan National University, Busan, South Korea, 609-735

    Chang-Su Lee

  2. School of Mechanical Engineering, Pusan National University, Busan, South Korea, 609-735

    Chung-Gil Kang

  3. National Institute of Advanced Industrial Science and Technology, 1-2-1 Namiki, Tsukuba, Ibaraki, Japan, 305-8564

    Sung-Won Youn

Authors
  1. Chang-Su Lee
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  2. Chung-Gil Kang
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  3. Sung-Won Youn
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Correspondence to Chung-Gil Kang.

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Lee, CS., Kang, CG. & Youn, SW. Effect of forming conditions on linear patterning of polymer materials by hot embossing process. Int. J. Precis. Eng. Manuf. 11, 119–127 (2010). https://doi.org/10.1007/s12541-010-0015-2

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  • DOI: https://doi.org/10.1007/s12541-010-0015-2

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