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Modeling of an Inductively Coupled Plasma for the Synthesis of Nanoparticles

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Abstract

Among other methods, inductively coupled plasma (ICP) torches can be used for the synthesis of nanoparticles. In this process, the precursor material is vaporized in the first step in the plasma core. In the second step, nucleation and condensation occur in the synthesis chamber where the plasma gets colder and high-purity nanoparticles are synthesized, the growth of which is stopped by gas quenching. From their low velocity and high temperature, induction plasmas are particularly adapted for this application. Numerical modeling is a good way to achieve a better knowledge and understanding of the process since non-intrusive diagnostics are fairly difficult to implement. In the present article, a two-dimensional model of an ICP torch was developed and validated on the basis of comparisons with data obtained by some other authors. Finally, the current frequency (13.56 MHz), pressure level (0.04 MPa), and gas flow rates were adjusted for the specific conditions of nanoparticles synthesis.

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Authors and Affiliations

  1. LERMPS, University of Technology of Belfort-Montbéliard, Belfort Cedex, France

    Rodolphe Bolot & Christian Coddet

  2. EMPA – Materials Science and Technology, Thun, Switzerland

    Cornelis Schreuders, Marc Leparoux & Stephan Siegmann

Authors
  1. Rodolphe Bolot
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  2. Christian Coddet
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  3. Cornelis Schreuders
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  4. Marc Leparoux
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  5. Stephan Siegmann
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Corresponding author

Correspondence to Rodolphe Bolot.

Additional information

This article is an invited paper selected from presentations at the 2007 International Thermal Spray Conference and has been expanded from the original presentation. It is simultaneously published in Global Coating Solutions, Proceedings of the 2007 International Thermal Spray Conference, Beijing, China, May 14-16, 2007, Basil R. Marple, Margaret M. Hyland, Yuk-Chiu Lau, Chang-Jiu Li, Rogerio S. Lima, and Ghislain Montavon, Ed., ASM International, Materials Park, OH, 2007.

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Bolot, R., Coddet, C., Schreuders, C. et al. Modeling of an Inductively Coupled Plasma for the Synthesis of Nanoparticles. J Therm Spray Tech 16, 690–697 (2007). https://doi.org/10.1007/s11666-007-9078-8

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  • DOI: https://doi.org/10.1007/s11666-007-9078-8

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