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Fabrication and Characterization of Bi2Te3-Based Chip-Scale Thermoelectric Energy Harvesting Devices

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Abstract

Thermoelectric energy harvesters convert otherwise wasted heat into electrical energy. As a result, they have the potential to play a critical role in the autonomous wireless sensor network signal chain. In this paper, we present work carried out on the development of Bi2Te3-based thermoelectric chip-scale energy harvesting devices. Process flow, device demonstration and characterization are highlighted.

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Authors and Affiliations

  1. Analog Devices, Inc., Wilmington, MA, USA

    Jane Cornett, Baoxing Chen, Samer Haidar,  Helen Berney, Pat McGuinness & Bill Lane

  2. Department of Electrical Engineering, Northeastern University, Boston, MA, USA

    Yuan Gao, Yifan He & Nian Sun

  3. Department of Mechanical Engineering, Stanford University, Palo Alto, CA, USA

    Marc Dunham, Mehdi Asheghi &  Ken Goodson

  4. Department of Electrical Engineering, University of Michigan, Ann Arbor, MI, USA

    Yi Yuan & Khalil Najafi

Authors
  1. Jane Cornett
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  2. Baoxing Chen
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  3. Samer Haidar
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  4. Helen Berney
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  5. Pat McGuinness
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  6. Bill Lane
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  7. Yuan Gao
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  8. Yifan He
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  9. Nian Sun
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  10. Marc Dunham
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  11. Mehdi Asheghi
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  12. Ken Goodson
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  13. Yi Yuan
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  14. Khalil Najafi
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Corresponding author

Correspondence to Jane Cornett.

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Cornett, J., Chen, B., Haidar, S. et al. Fabrication and Characterization of Bi2Te3-Based Chip-Scale Thermoelectric Energy Harvesting Devices. J. Electron. Mater. 46, 2844–2846 (2017). https://doi.org/10.1007/s11664-016-4992-5

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  • DOI: https://doi.org/10.1007/s11664-016-4992-5

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