Skip to main content
Log in

Design and Growth of Visible-Blind and Solar-Blind III-N APDs on Sapphire Substrates

  • Published:
Journal of Electronic Materials Aims and scope Submit manuscript

Abstract

GaN-based visible-blind and AlGaN-based solar-blind avalanche photodiodes (APDs) have been grown and fabricated on sapphire substrates. The GaN p-i-n APDs show low dark current with high gain. The AlGaN layers for the Al0.55Ga0.45N-based APDs are grown using a newly developed pulsed metalorganic chemical vapor deposition (MOCVD) process, and the material characterization results show excellent material quality. The spectral responsivity of the devices show a bandpass characteristic with cutoffs in the ultraviolet (UV) visible-blind and solar-blind spectrum for GaN- and Al0.55Ga0.45N-based APDs, respectively.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. P. Schreiber, T. Dang, T. Pickenpaugh, G.A. Smith, P. Gehred, and C.W. Litton, Proc. SPIE 3629, 230 (1999).

    Article  Google Scholar 

  2. S. Verghese, K.A. Mcintosh, R.J. Molnar, L.J. Mahoney, R.L. Aggarwal, M.W. Geis, K.M. Molvar, E.K. Duerr, S. Member, I. Melngailis, and L. Fellow, IEEE Trans. Electron. Devices 48, 502 (2001).

    Article  CAS  Google Scholar 

  3. M. Asif Khan, M. Shatalov, H.P. Maruska, H.M. Wang, and E. Kuokstis, Jpn. J. Appl. Phys. 44, 7191 (2005).

    Article  Google Scholar 

  4. E. Cicek, Z. Vashaei, C. Bayram, R. McClintock, M. Razeghi, and M.P. Ulmer, SPIE, 77801P (2010).

  5. L. Sun, J. Chen, J. Li, and H. Jiang, Appl. Phys. Lett. 97, 191103 (2010).

    Article  Google Scholar 

  6. R. McClintock, A. Yasan, K. Minder, P. Kung, and M. Razeghi, Appl. Phys. Lett. 87, 241123 (2005).

    Article  Google Scholar 

  7. T. Tut, M. Gokkavas, A. Inal, and E. Ozbay, Appl. Phys. Lett. 90, 163506 (2007).

    Article  Google Scholar 

  8. I. Ahmad, B. Krishnan, B. Zhang, Q. Fareed, M. Lachab, J. Dion, and A. Khan, Phys. Status Solidi A 208, 1501 (2011).

    Article  CAS  Google Scholar 

  9. M.Z. Kauser, A. Osinsky, A.M. Dabiran, and P.P. Chow, Appl. Phys. Lett. 85, 5275 (2004).

    Article  CAS  Google Scholar 

  10. R. McClintock, J.L. Pau, C. Bayram, B. Fain, P. Giedraitis, M. Razeghi, and M.P. Ulmer, SPIE, 7222, 72220U (2009).

  11. X. Wang, W. Hu, X. Chen, J. Xu, L. Wang, X. Li, and W. Lu, J. Phys. D Appl. Phys. 44, 405102 (2011).

    Article  Google Scholar 

  12. J.P. Zhang, H.M. Wang, M.E. Gaevski, C.Q. Chen, Q. Fareed, J.W. Yang, G. Simin, and M.A. Khan, Appl. Phys. Lett. 80, 3542 (2002).

    Article  CAS  Google Scholar 

  13. H. Amano and I. Akasaki, Opt. Mater. 19, 4 (2002).

    Article  Google Scholar 

  14. R. Hall and J.H. Leck, Int. J. Electron. 25, 539 (1968).

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Puneet Suvarna.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Suvarna, P., Tungare, M., Leathersich, J.M. et al. Design and Growth of Visible-Blind and Solar-Blind III-N APDs on Sapphire Substrates. J. Electron. Mater. 42, 854–858 (2013). https://doi.org/10.1007/s11664-013-2537-8

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11664-013-2537-8

Keywords

Navigation