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Real-time optical techniques and QMS to characterize growth in a modified commercial OMVPE reactor

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Abstract

We describe a modified commercial OMVPE reactor that incorporates quadrupole mass spectrometry (QMS) with a broadband parallel-processing optical spectrometer that simultaneously performs spectroscopic ellipsometry (SE) and reflectance-difference spectroscopy (RDS) measurements. We demonstrate its use by determining the surface temperature of Si to a precision of ±1°C and investigating the initial stages of GaP heteroepitaxy on Si(100). Analysis of the real-time SE data indicates that under our conditions GaP and Si interpenetrate as optically identifiable materials on a thickness scale of 100Å.

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References

  1. D.E. Aspnes, E. Colas, A.A. Studna, R. Bhat, M.A. Koza, and V.G. Keramidas, Phys. Rev. Lett. 61, 2782 (1988).

    Article  CAS  Google Scholar 

  2. I. Kamiya, D.E. Aspnes, H. Tanaka, L.T. Florez, J.P. Harbison, and R. Bhat, Phys. Rev. Lett. 68, 627 (1992).

    Article  CAS  Google Scholar 

  3. S. Dakshina Murthy, I. Bhat, B. Johs, S. Pittal, and Ping He, J. Electron. Mater. 24, 1087 (1995).

    Google Scholar 

  4. M. Zorn, J. Joensson, W. Richter, J.-T. Zettler and K. Ploska, physica status solidi (a), 152, 23 (1995).

    Article  CAS  Google Scholar 

  5. A.G. Thompson, R. Karlicek, E. Armour, W. Kroll, P. Zawadzki, and R.A. Stall, III, Vs. Rev. 9, 12 (1996).

    Article  Google Scholar 

  6. J.-T. Zettler, M. Pristovsek, T. Trepk, A. Shkrebtii, E. Steimetz, M. Zorn, and W. Richter, Thin Solid Films 313–314, 537 (1998).

    Article  Google Scholar 

  7. V.S. Ban, J. Electrochem. Soc. 118, 1473 (1971).

    Article  CAS  Google Scholar 

  8. M. Mashita, S. Horiguchi, M. Shimazu, K. Kamon, M. Mihara, and M. Ishii, J. Cryst. Growth 77, 819 (1986).

    Article  Google Scholar 

  9. P.W. Lee, T.R. Omstead, D.R. McKenna, and K.F. Jensen, J. Cryst. Growth 85, 165 (1987).

    Article  CAS  Google Scholar 

  10. Y. Tsutsumi, M. Ikegawa, T. Usui, Y. Ichikawa, K. Watanabe, and J. Kobayashi, J. Vac. Sci. Technol. A 14, 2337 (1996).

    Article  CAS  Google Scholar 

  11. N.I. Buchan, C.A. Larsen, and G.B. Stringfellow, Appl. Phys. Lett. 51, 1024 (1987).

    Article  CAS  Google Scholar 

  12. D.E. Aspnes, W.E. Quinn and S. Gregory, Appl. Phys. Lett. 57, 2707 (1990).

    Article  CAS  Google Scholar 

  13. D.E. Aspnes, W.E. Quinn, M.C. Tamargo, M.A.A. Pudensi, S.A. Schwarz, M.J.S.P. Brasil, and S. Gregory, Appl. Phys. Lett. 60, 1244 (1992).

    Article  CAS  Google Scholar 

  14. G.N. Maracas, C.H. Kuo, S. Anand, R. Droopad, G.R.L. Sohie, and T. Levola, J. Vac. Sci. Technol. A 13, 727 (1995).

    Article  CAS  Google Scholar 

  15. C. Herzinger, B. Johs, P. Chow, D. Reich, G. Carpenter, D. Croswell, and J. Van Hove, Mat. Res. Soc. Symp. Proc. 406, 347 (1996).

    CAS  Google Scholar 

  16. C.H. Kuo, M.D. Boonzaayer, M.F. DeHerrera, D.K. Schroder, G.N. Maracas, and B. Johs, J. Cryst. Growth 175/176, 281 (1997).

    Article  CAS  Google Scholar 

  17. B. Johs, D. Doerr, and S. Pittal, Thin Solid Films 233, 293 (1993).

    Article  CAS  Google Scholar 

  18. R.M.H. van de Leur, A.J.G. Schellingerhout, J.E. Mooij, and F. Tuinstra, Appl. Phys. Lett. 52, 1005 (1988).

    Article  Google Scholar 

  19. K.R. Evans, R. Kaspi, C.R. Jones, R.E. Sherriff, V. Jogai, and D.C. Reynolds, J. Cryst. Growth 127, 523 (1993); R. Kaspi, W.T. Cooley, and K.R. Evans, J. Cryst. Growth 173, 5 (1997).

    Article  CAS  Google Scholar 

  20. D.W. Greve, T.J. Knight, X. Cheng, B.H. Krogh, and M.A. Gibson, J. Vac. Sci. Technol. B 14, 489 (1996).

    Article  CAS  Google Scholar 

  21. K.J. Bachmann, U. Rossow, and N. Dietz, Mater. Sci. Eng. B 35, 472 (1995); N. Dietz, U. Rossow, D.E. Aspnes, and K.J. Bachmann, J. Electron. Mater. 24, 1571 (1995).

    Article  Google Scholar 

  22. D.E. Aspnes, J. Opt. Soc. Am. 10, 974 (1993).

    Article  Google Scholar 

  23. M. Ebert, K.A. Bell, S.D. Yoo, and D.E. Aspnes, Thin Solid Films, in press.

  24. S.D. Yoo and D.E. Aspnes, phys. stat. solidi. (b) 215, 715 (1999).

    Article  Google Scholar 

  25. Y.P. Varshni, Physica 34, 149 (1967).

    Article  CAS  Google Scholar 

  26. G.E. Jellison, Jr. and F.A. Modine, Phys. Rev. B 27, 7466 (1983); P. Lautenschlager, P.B. Allen, and M. Cardona, Phys. Rev. B 31, 2163 (1985).

    Article  CAS  Google Scholar 

  27. D.E. Aspnes, Physica B 117/118, 359 (1983).

    Article  Google Scholar 

  28. S.D. Hersee and J.M. Ballingall, J. Vac. Sci. Technol. A 8, 800 (1990).

    Article  CAS  Google Scholar 

  29. K.C. Baucom, K.P. Killeen, and H.K. Moffat, J. Electron. Mater. 24, 1703 (1995).

    CAS  Google Scholar 

  30. D.E. Aspnes and A.A. Studna, Phys. Rev. B 27, 985 (1983).

    Article  CAS  Google Scholar 

  31. T. Soga, T. Jimbo, and M. Umeno, J. Cryst. Growth 163, 165 (1996).

    Article  CAS  Google Scholar 

  32. T. Soga, Y. Kohama, K. Uchida, M. Tajima, T. Jimbo, and M. Umeno, J. Cryst. Growth 93, 499 (1988).

    Article  CAS  Google Scholar 

  33. S.W. Choi, G. Lucovsky, and K.J. Bachmann, J. Vac. Sci. Technol. B 10, 1070 (1992).

    Article  CAS  Google Scholar 

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Authors and Affiliations

  1. Department of Physics, North Carolina State University, 27695-8202, Raleigh, NC, USA

    K. A. Bell, M. Ebert, S. D. Yoo, K. Flock & D. E. Aspnes

Authors
  1. K. A. Bell
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  2. M. Ebert
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  3. S. D. Yoo
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  4. K. Flock
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  5. D. E. Aspnes
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Bell, K.A., Ebert, M., Yoo, S.D. et al. Real-time optical techniques and QMS to characterize growth in a modified commercial OMVPE reactor. J. Electron. Mater. 29, 106–111 (2000). https://doi.org/10.1007/s11664-000-0104-6

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  • DOI: https://doi.org/10.1007/s11664-000-0104-6

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