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Silicon Dioxide Coating of Titanium Dioxide Nanoparticles from Dielectric Barrier Discharge in a Gaseous Mixture of Silane and Nitrogen

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Abstract

The coating of titanium dioxide nanoparticles with silicon dioxide has been carried out by dielectric barrier discharge (DBD) plasma treatments to enhance the thermostability of Titania for applications at high temperature processes. During the first coating processing step, a closed film of silicon nitride was produced via plasma treatment in a gaseous mixture of silane and nitrogen, while atmospheric surface contaminations got mainly removed. In the second processing step, the DBD plasma treatment in oxygen or air was used to convert the silicon nitride mainly into silicon dioxide. Remaining carbon impurities at the interfaces between titanium dioxide and silicon nitride after the nitrogen/silane plasma treatment were subsequently removed simultaneously. Atomic force microscopy and X-ray photoelectron spectroscopy were employed to study the DBD plasma treatments of the TiO2 nanoparticles.

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Acknowledgments

We gratefully acknowledge the financial support by the Deutsche Forschungsgemeinschaft (DFG) under project numbers MA 1893/18-1, VI 359/9-1 and WE 2331/10-1.

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Authors and Affiliations

  1. Institut für Energieforschung und Physikalische Technologien, Technische Universität Clausthal, Leibnizstrasse 4, 38678, Clausthal-Zellerfeld, Germany

    Sebastian Dahle, Lienhard Wegewitz & Wolfgang Maus-Friedrichs

  2. Fakultät für Naturwissenschaften und Technik, Hochschule für Angewandte Wissenschaft und Kunst, Von-Ossietzky-Straße 99, 37085, Göttingen, Germany

    Sebastian Dahle

  3. Clausthaler Zentrum für Materialtechnik, Technische Universität Clausthal, Leibnizstrasse 4, 38678, Clausthal-Zellerfeld, Germany

    Lienhard Wegewitz & Wolfgang Maus-Friedrichs

  4. Institut für Mechanische Verfahrenstechnik, Technische Universität Clausthal, Leibnizstrasse 19, 38678, Clausthal-Zellerfeld, Germany

    Fei Qi & Alfred P. Weber

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  1. Sebastian Dahle
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  2. Lienhard Wegewitz
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  3. Fei Qi
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  5. Wolfgang Maus-Friedrichs
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Correspondence to Wolfgang Maus-Friedrichs.

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Dahle, S., Wegewitz, L., Qi, F. et al. Silicon Dioxide Coating of Titanium Dioxide Nanoparticles from Dielectric Barrier Discharge in a Gaseous Mixture of Silane and Nitrogen. Plasma Chem Plasma Process 33, 839–853 (2013). https://doi.org/10.1007/s11090-013-9472-6

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