Abstract
We present a novel simulation and design of a high-performance biosensor, which incorporates slotted Bragg-grating-based Fabry–Perot (FP) resonator structure in the silicon-on-insulator material. The device has a length of 30 um and width of 1 um, which offers a great potential for the realization of an integrated sensor array.With the combination of slot waveguide and grating FP cavity, good sensing performance can be obtained. The effect of some key structure parameters, i.e., the number of Bragg grating grids, the cavity length and slot width, on the device properties are investigated carefully. The sensitivity of 624 nm/RIU is almost nine times that of the conventional micro-ring sensor. The wide free spectral range of 23.7 nm, extinction ratio of 14.2 dB and high quality factor of 676.5 efficiently meet the requirements of high sensitivity and wide-range measurement. Also the novel biosensor shows good sensing performance with different organic solutions. All the results indicate that this device is a great promising technology platform for future biochemical sensor applications.
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Acknowledgments
This work was sponsored in part by the National Natural Science Foundation of China under Grant 61107088 and Grant 61107061, Program for New Century Excellent Talents in University under Grant NCET-12-0092, Specialized Research Fund for the Doctoral Program of Higher Education (SRFDP) under Grant 20100185120016, Project of international sci-tech cooperation and exchange research of Sichuan Province under Grant 2012HH0001, the Scientific Research Foundation for the Returned Overseas Chinese Scholars of State Education Ministry under Grant 2012GJ002, the State Key Laboratory of Electronic Thin Films and Integrated Devices under Grant KFJJ201112, and State Key Laboratory on Integrated Optoelectronics under Grant 2011KFB008.
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Yuan, G., Gao, L., Chen, Y. et al. Efficient optical biochemical sensor with slotted Bragg-grating-based Fabry–Perot resonator structure in silicon-on-insulator platform. Opt Quant Electron 47, 247–255 (2015). https://doi.org/10.1007/s11082-014-9908-0
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DOI: https://doi.org/10.1007/s11082-014-9908-0