Skip to main content
SpringerLink
Log in

ZrO2 thin films on Si substrate

  • Published:
Journal of Materials Science: Materials in Electronics Aims and scope Submit manuscript

Abstract

In the advancement of metal–oxide–semiconductor technology, Si-based semiconductor, with SiO2 as outstanding dielectric, has been dominating microelectronic industry for decades. However, the drastic down-scaling in ultra-large-scale integrated circuitry has made ultrathin SiO2 (~1.2 nm) unacceptable for many practical reasons. Introduction of ZrO2 as high-κ dielectrics replacing SiO2 is undeniably a potential yet formidable solution for the aforementioned problem. The objective of this review is to present the current knowledge of ZrO2 thin film as gate dielectric on Si, in terms of its material and electrical properties produced by various deposition techniques. One of the techniques being focused is thermal oxidation of sputtered Zr and the mechanisms of transforming the metal into oxide has been extensively reviewed.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  1. G.D. Wilk, R.M. Wallace, J.M. Anthony, J Appl Phys 89, 5243 (2001)

    Article  ADS  CAS  Google Scholar 

  2. S. Guha, V. Narayanan, Annu Rev Mater Res 39, 181 (2009). doi:10.1146/annurev-matsci-082908-145320

    Article  ADS  CAS  Google Scholar 

  3. T. Conard, H. Bender, W. Vandervorst, in Dielectric films for advanced microelectronics, ed. by M. Baklanov, M. Green, K. Maex (Wiley, New York, 2007)

    Google Scholar 

  4. R. Degraeve, J. Schmitz, L. Pantisano, E. Simoen, M. Houssa, B. Kaczer, G. Groeseneken, in Dielectric films for advanced microelectronics, ed. by M. Baklanov, M. Green, K. Maex (Wiley, New York, 2007)

    Google Scholar 

  5. Chau R, Datta S, Doczy M, Kavalieros J, Metz M (2003) in Extended Abstracts of International Workshop on Gate Insulator (IWGI) 2003 p. 124

  6. S. Miyazaki, Appl Surf Sci 190, 66 (2002)

    Article  ADS  CAS  Google Scholar 

  7. G. Giorgi, A. Korkin, K. Yamashita, Comp Mater Sci 43, 930 (2008)

    Article  CAS  Google Scholar 

  8. International Technology Roadmap for Semiconductors (ITRS) 2008, (http://www.itrs.net/Links/2008ITRS/Home2008.htm, most recent updates 2009)

  9. J. Robertson, Eur Phys J Appl Phys 28, 265 (2004)

    Article  ADS  CAS  Google Scholar 

  10. H. Wong, H. Iwai, Microelectron. Eng. 83, 1867 (2006)

    Article  CAS  Google Scholar 

  11. J. Robertson, Rep Prog Phys 69, 327 (2006)

    Article  ADS  CAS  Google Scholar 

  12. R.M. Wallace, G.D. Wilk, Crit Rev Solid State Mater Sci 28, 231 (2003)

    Article  CAS  Google Scholar 

  13. M.D. Groner, J.W. Elam, F.H. Fabreguette, S.M. George, Thin Solid Films 413, 186 (2002)

    Article  ADS  CAS  Google Scholar 

  14. Gusev EP, Buchanan DA, Cartier E, Kumar A, DiMaria D, Guha S, Callegari A, Zafar S, Jamison PC, Neumayer DA, Copel M, Gribelyuk MA, Okorn-Schmidt H, D’Emic C, Kozlowski P, Chan K, Bojarczuk N, Ragnarsson LA, Ronsheim P, Rim K, Fleming RJ, Mocuta A, Ajmera A (2001) International electron devices meeting (IEDM) technical digest 2001. p. 20.1.1

  15. Manchanda L, Lee WH, Bower JE, Baumann FH, Brown WL, Case CJ, Keller RC, Kim YO, Laskowski EJ, Morris MD, Opila RL, Silverman PJ, Sorsch TW, Weber GR (1998) International electron devices meeting (IEDM) technical digest 1998 p. 605

  16. M. Copel, M. Gribelyuk, E. Gusev, Appl Phys Lett 76, 436 (2000)

    Article  ADS  CAS  Google Scholar 

  17. M. Gutowski, J.E. Jaffe, C.-L. Liu, M. Stoker, R.I. Hegde, R.S. Rai, P.J. Tobin, Appl Phys Lett 80, 1897 (2002)

    Article  ADS  CAS  Google Scholar 

  18. T.S. Jeon, J.M. White, D.L. Kwong, Appl Phys Lett 78, 368 (2001)

    Article  ADS  CAS  Google Scholar 

  19. J.P. Maria, D. Wicaksana, A.I. Kingon, B. Busch, H. Schulte, E. Garfunkel, T. Gustafsson, J Appl Phys 90, 3476 (2001)

    Article  ADS  CAS  Google Scholar 

  20. D. Shin, Z.-K. Liu, Scr Mater 57, 201 (2007)

    Article  CAS  Google Scholar 

  21. N.-L. Zhang et al., Chin Phys Lett 19, 395 (2002)

    Article  ADS  Google Scholar 

  22. E.P. Gusev, C. Cabral, M. Copel, C. D’Emic, M. Gribelyuk, Microelectron. Eng. 69, 145 (2003)

    Article  CAS  Google Scholar 

  23. G. Vellianitis, G. Apostolopoulos, G. Mavrou, K. Argyropoulos, A. Dimoulas, J.C. Hooker, T. Conard, M. Butcher, Mater Sci Eng B 109, 85 (2004)

    Article  CAS  Google Scholar 

  24. S.A. Campbell, D.C. Gilmer, X.-C. Wang, M.-T. Hsieh, H.-S. Kim, W.L. Gladfelter, J. Yan, IEEE Trans Electron Devices 44, 104 (1997)

    Article  ADS  CAS  Google Scholar 

  25. P.R. McCurdy, L.J. Sturgess, S. Kohli, E.R. Fisher, Appl Surf Sci 233, 69 (2004)

    Article  ADS  CAS  Google Scholar 

  26. T. Dimitrova, E. Atanassova, Vacuum 51, 151 (1998)

    Article  CAS  Google Scholar 

  27. Lu HC, Yasuda N, Garfunkel E, Gustafsson T, Chang JP, Opila RL, Alers G (1999) Structural properties of thin films of high dielectric constant materials on silicon. In: Proceedings of the 11th Biennial Conference on Insulating Films on Semiconductors. Elsevier, Kloster Banz

  28. D. Spassov, E. Atanassova, D. Virovska, Appl Phys A 82, 55 (2006)

    Article  ADS  CAS  Google Scholar 

  29. S.-K. Kang, D.-H. Ko, E.-H. Kim, M.H. Cho, C.N. Whang, Thin Solid Films 353, 8 (1999)

    Article  ADS  CAS  Google Scholar 

  30. J. Kwo, M. Hong, B. Busch, D.A. Muller, Y.J. Chabal, A.R. Kortan, J.P. Mannaerts, B. Yang, P. Ye, H. Gossmann, A.M. Sergent, K.K. Ng, J. Bude, W.H. Schulte, E. Garfunkel, T. Gustafsson, J. Cryst. Growth 251, 645 (2003)

    Article  ADS  CAS  Google Scholar 

  31. F. Paumier, R.J. Gaboriaud, Thin Solid Films 441, 307 (2003)

    Article  ADS  CAS  Google Scholar 

  32. J. Robertson, P.W. Peacock, Microelectron. Eng. 72, 112 (2004)

    Article  CAS  Google Scholar 

  33. J. Robertson, Appl Surf Sci 190, 2 (2002)

    Article  ADS  CAS  Google Scholar 

  34. C. Chaneliere, J.L. Autran, R.A.B. Devine, B. Balland, Mater Sci Eng R 22, 269 (1998)

    Article  Google Scholar 

  35. K.J. Hubbard, D.G. Schlom, J Mater Res 11, 2757 (1996)

    Article  ADS  CAS  Google Scholar 

  36. M.H. Cho, D.H. Ko, K. Jeong, S.W. Whangbo, C.N. Whang, S.C. Choi, S.J. Cho, Thin Solid Films 349, 266 (1999)

    Article  ADS  CAS  Google Scholar 

  37. G. He, Q. Fang, J.X. Zhang, L.Q. Zhu, M. Liu, L.D. Zhang, Nanotechnology 16, 1641 (2005)

    Article  ADS  CAS  Google Scholar 

  38. C.Y. Ma, Q.Y. Zhang, Vacuum 82, 847 (2008)

    Article  CAS  Google Scholar 

  39. R. Puthenkovilakam, E.A. Carter, J.P. Chang, Phys Rev B 69, 155329 (2004)

    Article  ADS  CAS  Google Scholar 

  40. S.J. Wang, Y.F. Dong, C.H.A. Huan, Y.P. Feng, C.K. Ong, Mater Sci Eng B 118, 122 (2005)

    Article  CAS  Google Scholar 

  41. H.H. Zhang, C.Y. Ma, Q.Y. Zhang, Vacuum 83, 1311 (2009)

    Article  CAS  Google Scholar 

  42. J.X. Zheng, G. Ceder, T. Maxisch, W.K. Chim, W.K. Choi, Phys Rev B 75, 104112 (2007)

    Article  ADS  CAS  Google Scholar 

  43. S. Maikap, J.-H. Lee, R. Mahapatra, S. Pal, Y.S. No, W.-K. Choi, S.K. Ray, D.-Y. Kim, Solid-State Electron. 49, 524 (2005)

    Article  ADS  CAS  Google Scholar 

  44. I. Jõgi, K. Kukli, M. Ritala, M. Leskelä, J. Aarik, A. Aidla, J. Lu, Microelectron. Eng. 87, 144 (2010)

    Article  CAS  Google Scholar 

  45. H.D. Kim, S.W. Jeong, M.T. You, Y. Roh, Thin Solid Films 515, 522 (2006)

    Article  ADS  CAS  Google Scholar 

  46. H.W. Chen, T.Y. Huang, D. Landheer, X. Wu, S. Moisa, G.I. Sproule, J.K. Kim, W.N. Lennard, T.S. Chao, J. Electrochem. Soc. 150, C465 (2003)

    Article  CAS  Google Scholar 

  47. M. Filipescu, N. Scarisoreanu, V. Craciun, B. Mitu, A. Purice, A. Moldovan, V. Ion, O. Toma, M. Dinescu, Appl Surf Sci 253, 8184 (2007)

    Article  ADS  CAS  Google Scholar 

  48. R. Sharma, A. Kumar, J. Anthony, J Min, Metals Mater Soc (JOM) 53, 53 (2001)

    CAS  Google Scholar 

  49. H.S. Choi, K.S. Seol, D.Y. Kim, J.S. Kwak, C.-S. Son, I.-H. Choi, Vacuum 80, 310 (2005)

    Article  CAS  Google Scholar 

  50. K. Prabakar, A. Park, N. Cho, W.I. Lee, C.K. Hwangbo, J.G. Lee, C. Lee, Vacuum 82, 1367 (2008)

    Article  CAS  Google Scholar 

  51. D. Pamu, K. Sudheendran, M.G. Krishna, K.C.J. Raju, A.K. Bhatnagar, Thin Solid Films 517, 1587 (2009)

    Article  ADS  CAS  Google Scholar 

  52. M. Houssa, L. Pantisano, L. Ragnarsson, R. Degraeve, T. Schram, G. Pourtois, S. De Gendt, G. Groeseneken, M.M. Heyns, Mater Sci Eng R 51, 37 (2006)

    Article  CAS  Google Scholar 

  53. B. Cheng, M. Cao, R. Rao, A. Inani, P. Vande Voorde, W.M. Greene, J.M.C. Stork, Z. Yu, P.M. Zeitzoff, J.C.S. Woo, IEEE Trans Electron Devices 46, 1537 (1999)

    Article  ADS  CAS  Google Scholar 

  54. F. Ji, J.P. Xu, P.T. Lai, J.G. Guan, Microelectron. Reliab. 48, 693 (2008)

    Article  Google Scholar 

  55. N.R. Mohapatra, M.P. Desai, S.G. Narendra, V.R. Rao, IEEE Trans Electron Devices 49, 826 (2002)

    Article  ADS  Google Scholar 

  56. N.R. Mohapatra, A. Dutta, G. Sridhar, M.P. Desai, V.R. Rao, Microelectron. Reliab. 41, 1045 (2001)

    Article  Google Scholar 

  57. D.P. Thompson, A.M. Dickins, J.S. Thorp, J. Mater. Sci. 27, 2267 (1992)

    Article  ADS  CAS  Google Scholar 

  58. A. Franciosi, C.G. Van de Walle, Surf Sci Rep 25, 1 (1996)

    Article  CAS  Google Scholar 

  59. K.W. Boer, Survey of semiconductor physics (Wiley, New York, 2002)

    Google Scholar 

  60. He B, Hoilien N, Smith R, Ma T, Taylor C, St Omer I, Campbell SA, Gladfelter WL, Gribelyuk M, Buchanan D (1999) In: Proceedings of the 13th Biennial University/Government/Industry Microelectronics Symposium, 1999 p. 33

  61. J. Robertson, J. Non-Cryst. Solids 303, 94 (2002)

    Article  ADS  CAS  Google Scholar 

  62. E. Bonera, G. Scarel, M. Fanciulli, J. Non-Cryst. Solids 322, 105 (2003)

    Article  ADS  CAS  Google Scholar 

  63. X. Wu, D. Landheer, M.J. Graham, H.W. Chen, T.Y. Huang, T.S. Chao, J. Cryst. Growth 250, 479 (2003)

    Article  ADS  CAS  Google Scholar 

  64. S. Stemmer, J Vac Sci Technol B 22, 791 (2004)

    Article  CAS  Google Scholar 

  65. B.W. Busch, W.H. Schulte, E. Garfunkel, T. Gustafsson, W. Qi, R. Nieh, J. Lee, Phys Rev B 62, R13290 (2000)

    Article  ADS  CAS  Google Scholar 

  66. M.A. Gribelyuk, A. Callegari, E.P. Gusev, M. Copel, D.A. Buchanan, J Appl Phys 92, 1232 (2002)

    Article  ADS  CAS  Google Scholar 

  67. N. Zhang, Z. Song, S. Xing, Q. Shen, C. Lin, Microelectron. Eng. 66, 427 (2003)

    Article  CAS  Google Scholar 

  68. X. Cheng, Z. Qi, G. Zhang, Y. Chen, T. Li, G. Pan, M. Yin, Appl Surf Sci 256, 838 (2009)

    Article  ADS  CAS  Google Scholar 

  69. P.W. Peacock, J. Robertson, Phys. Rev. Lett. 92, 057601 (2004)

    Article  ADS  PubMed  CAS  Google Scholar 

  70. Y.F. Dong, Y.P. Feng, S.J. Wang, A.C.H. Huan, Phys Rev B 72, 045327 (2005)

    Article  ADS  CAS  Google Scholar 

  71. P.W. Peacock, K. Xiong, K. Tse, J. Robertson, Phys Rev B 73, 075328 (2006)

    Article  ADS  CAS  Google Scholar 

  72. X. Zhao, D. Vanderbilt, Phys Rev B 65, 075105 (2002)

    Article  ADS  CAS  Google Scholar 

  73. W. Lin, J. Kang, Z. Zhu, Mater Sci Eng 99, 553 (2003)

    Article  CAS  Google Scholar 

  74. M. Bhaskaran, P.K. Swain, D. Misra, Electrochem Solid-State Lett 7, F38 (2004)

    Article  CAS  Google Scholar 

  75. N.L. Zhang, Z.T. Song, Q. Wan, Q.W. Shen, C.L. Lin, Appl Surf Sci 202, 126 (2002)

    Article  ADS  CAS  Google Scholar 

  76. K.P.S.S. Hembram, G. Dutta, U.V. Waghmare, G. Mohan Rao, Physica B 399, 21 (2007)

    Article  ADS  CAS  Google Scholar 

  77. S.H. Jeong, I.S. Bae, Y.S. Shin, S.B. Lee, H.T. Kwak, J.H. Boo, Thin Solid Films 475, 354 (2005)

    Article  ADS  CAS  Google Scholar 

  78. M.A. Signore, A. Rizzo, L. Mirenghi, M.A. Tagliente, A. Cappello, Thin Solid Films 515, 6798 (2007)

    Article  ADS  CAS  Google Scholar 

  79. Y. Zhou, N. Kojima, K. Sasaki, J Phys D 41, 175414 (2008)

    Article  ADS  CAS  Google Scholar 

  80. A. Rizzo, M.A. Signore, L. Mirenghi, T. Di Luccio, Thin Solid Films 517, 5956 (2009)

    Article  ADS  CAS  Google Scholar 

  81. I. Vrejoiu, D.G. Matei, M. Morar, G. Epurescu, A. Ferrari, M. Balucani, G. Lamedica, G. Dinescu, C. Grigoriu, M. Dinescu, Mater Sci Semicond Process 5, 253 (2002)

    Article  CAS  Google Scholar 

  82. T. Yamaguchi, H. Satake, N. Fukushima, IEEE Trans Electron Devices 51, 774 (2004)

    Article  ADS  CAS  Google Scholar 

  83. Yamaguchi T, Satake H, Fukushima N, Toriumi A (2000) In: International Electron Devices Meeting (IEDM) Technical Digest 2000 p. 19

  84. J. Zhu, T.L. Li, B. Pan, L. Zhou, Z.G. Liu, J Phys D 36, 389 (2003)

    Article  ADS  CAS  Google Scholar 

  85. J. Zhu, Z.G. Liu, Appl Phys A 78, 741 (2004)

    Article  ADS  CAS  Google Scholar 

  86. A.P. Huang, R.K.Y. Fu, P.K. Chu, L. Wang, W.Y. Cheung, J.B. Xu, S.P. Wong, J. Cryst. Growth 277, 422 (2005)

    Article  ADS  CAS  Google Scholar 

  87. Z.W. Zhao, B.K. Tay, L. Huang, J Phys D 37, 1701 (2004)

    Article  ADS  CAS  Google Scholar 

  88. A.P. Huang, Z.F. Di, R.K.Y. Fu, P.K. Chu, Surf Coat Technol 201, 8282 (2007)

    Article  CAS  Google Scholar 

  89. W.F.A. Besling, E. Young, T. Conard, C. Zhao, R. Carter, W. Vandervorst, M. Caymax, S. De Gendt, M. Heyns, J. Maes, M. Tuominen, S. Haukka, J. Non-Cryst. Solids 303, 123 (2002)

    Article  ADS  CAS  Google Scholar 

  90. S. Dueñas, H. Castán, H. García, A. Gómez, L. Bailón, K. Kukli, J. Niinistö, M. Ritala, M. Leskelä, Microelectron. Eng. 86, 1689 (1689)

    Article  CAS  Google Scholar 

  91. S. Ferrari, G. Scarel, C. Wiemer, M. Fanciulli, J Appl Phys 92, 7675 (2002)

    Article  ADS  CAS  Google Scholar 

  92. K. Kukli, K. Forsgren, J. Aarik, T. Uustare, A. Aidla, A. Niskanen, M. Ritala, M. Leskelä, A. Hårsta, J. Cryst. Growth 231, 262 (2001)

    Article  ADS  CAS  Google Scholar 

  93. K. Kukli, K. Forsgren, M. Ritala, M. Leskela, J. Aarik, A. Harsta, J. Electrochem. Soc. 148, F227 (2001)

    Article  CAS  Google Scholar 

  94. K. Kukli, M. Ritala, T. Uustare, J. Aarik, K. Forsgren, T. Sajavaara, M. Leskelä, A. Hårsta, Thin Solid Films 410, 53 (2002)

    Article  ADS  CAS  Google Scholar 

  95. B. Lee, K.J. Choi, A. Hande, M.J. Kim, R.M. Wallace, J. Kim, Y. Senzaki, D. Shenai, H. Li, M. Rousseau, J. Suydam, Microelectron. Eng. 86, 272 (2009)

    Article  CAS  Google Scholar 

  96. R. Matero, M. Ritala, M. Leskelä, A.C. Jones, P.A. Williams, J.F. Bickley, A. Steiner, T.J. Leedham, H.O. Davies, J. Non-Cryst. Solids 303, 24 (2002)

    Article  ADS  CAS  Google Scholar 

  97. M. Ritala, M. Leskelä, Appl Surf Sci 75, 333 (1994)

    Article  ADS  CAS  Google Scholar 

  98. M. Ritala, M. Leskelä, L. Niinistö, T. Prohaska, G. Friedbacher, M. Grasserbauer, Thin Solid Films 250, 72 (1994)

    Article  ADS  CAS  Google Scholar 

  99. A.M. Torres-Huerta, M.A. Domínguez-Crespo, E. Ramírez-Meneses, J.R. Vargas-García, Appl Surf Sci 255, 4792 (2009)

    Article  ADS  CAS  Google Scholar 

  100. S.I. Shah, G.H. Jaffari, E. Yassitepe, B. Ali, M.M. Peter, Handbook of deposition technologies for films and coatings, 3rd edn. (William Andrew Publishing, Boston, 2009), p. 135

    Google Scholar 

  101. B.K. Tay, Z.W. Zhao, D.H.C. Chua, Mater Sci Eng R 52, 1 (2006)

    Article  CAS  Google Scholar 

  102. M. Leskelä, M. Ritala, Thin Solid Films 409, 138 (2002)

    Article  ADS  Google Scholar 

  103. R. Mikko, L. Markku, Nanotechnology 10, 19 (1999)

    Article  Google Scholar 

  104. O. Sneh, R.B. Clark-Phelps, A.R. Londergan, J. Winkler, T.E. Seidel, Thin Solid Films 402, 248 (2002)

    Article  ADS  CAS  Google Scholar 

  105. J. Dwbrowski, H.-J. Mussig, Silicon surfaces and formation of interfaces (World Scientific, Singapore, 2000)

    Book  Google Scholar 

  106. S. Ben Amor, B. Rogier, G. Baud, M. Jacquet, M. Nardin, Mater Sci Eng B 57, 28 (1998)

    Article  Google Scholar 

  107. G. He, M. Liu, L.Q. Zhu, M. Chang, Q. Fang, L.D. Zhang, Surf. Sci. 576, 67 (2005)

    Article  ADS  CAS  Google Scholar 

  108. S.-W. Nam, J.-H. Yoo, S. Nam, H.-J. Choi, D. Lee, D.-H. Ko, J.H. Moon, J.-H. Ku, S. Choi, J. Non-Cryst. Solids 303, 139 (2002)

    Article  ADS  CAS  Google Scholar 

  109. S.H. Mohamed, A.M.A. El-Rahman, M.R. Ahmed, J Phys D 40, 7057 (2007)

    Article  ADS  CAS  Google Scholar 

  110. G. He, Q. Fang, M. Liu, L.Q. Zhu, L.D. Zhang, J. Cryst. Growth 268, 155 (2004)

    Article  ADS  CAS  Google Scholar 

  111. S. Venkataraj, D. Severin, S.H. Mohamed, J. Ngaruiya, O. Kappertz, M. Wuttig, Thin Solid Films 502, 228 (2006)

    Article  ADS  CAS  Google Scholar 

  112. P. Yashar, J. Rechner, M.S. Wong, W.D. Sproul, S.A. Barnett, Surf Coat Technol 94–95, 333 (1997)

    Article  Google Scholar 

  113. A.P. Huang, P.K. Chu, Mater Sci Eng B 121, 244 (2005)

    Article  CAS  Google Scholar 

  114. P. Yashar, J. Rechner, M.S. Wong, W.D. Sproul, S.A. Barnett, Surf Coat Technol 94–95, 333 (1997)

    Article  Google Scholar 

  115. B.E. Deal, A.S. Grove, J Appl Phys 36, 3770 (1965)

    Article  ADS  CAS  Google Scholar 

  116. P.V. Zant, Microchip fabrication (McGraw-Hill, New York, 2004)

    Google Scholar 

  117. R.M.C. de Almeida, I.J.R. Baumvol, Surf Sci Rep 49, 1 (2003)

    Article  ADS  CAS  Google Scholar 

  118. A. Athanassouli, T. Ganetsos, F. Klose, S. Messoloras, Semicond. Sci. Technol. 17, 65 (2002)

    Article  ADS  CAS  Google Scholar 

  119. G.S. May, S.M. Sze, Fundamentals of semiconductor fabrication (Wiley, New York, 2004)

    Google Scholar 

  120. A. Lyapin, L.P.H. Jeurgens, E.J. Mittemeijer, Acta Mater. 53, 2925 (2005)

    Article  CAS  Google Scholar 

  121. A. Khoviv, I. Shramchenko, Inorg Mater 43, 40 (2007)

    Article  CAS  Google Scholar 

  122. L.-Z. Hsieh, H.-H. Ko, P.-Y. Kuei, C.-Y. Lee, Jpn. J. Appl. Phys. 45, 7680 (2006)

    Article  ADS  CAS  Google Scholar 

  123. Y. Nagasato, T. Aya, Y. Iwazaki, M. Hasumi, T. Ueno, K. Kuroiwa, Jpn. J. Appl. Phys. 44, 5 (2005)

    Article  ADS  CAS  Google Scholar 

  124. Kurniawan T, Cheong KY, Abdul Razak K, Lockman Z, Ahmad Z (2010) J Mater Sci: Mater Electron. doi:10.1007/s1085401001031

  125. D.A. Johnson, Metals and chemical change (Royal Society of Chemistry, UK, 2002)

    Google Scholar 

  126. U. Müller, Inorganic structural chemistry (Wiley, New York, 1993)

    Google Scholar 

  127. R.T. DeHoff, Thermodynamics in materials science (CRC Press, London, 2006)

    Google Scholar 

  128. H. Myoren, Y. Nishiyama, H. Fukumoto, H. Nasu, Y. Osaka, Jpn. J. Appl. Phys. 28, 351 (1989)

    Article  ADS  CAS  Google Scholar 

  129. X. Wu, D. Landheer, M.J. Graham, H.W. Chen, T.Y. Huang, T.S. Chao, J. Cryst. Growth 250, 479 (2003)

    Article  ADS  CAS  Google Scholar 

  130. S. Venkataraj, O. Kappertz, C. Liesch, R. Detemple, R. Jayavel, M. Wuttig, Vacuum 75, 7 (2004)

    Article  CAS  Google Scholar 

Download references

Acknowledgments

Yew Hoong Wong would like to acknowledge USM fellowship and USM-RU-PRGS (Grant Number: 8032051) for providing financial support during the study. Kuan Yew Cheong would like to acknowledge the financial support given by The Academy Sciences for the Developing World (TWAS) through TWAS-COMSTECH Research Grant (09-105 RG/ENG/AS_C).

Author information

Authors and Affiliations

  1. Energy Efficient & Sustainable Semiconductor Research Group, School of Materials and Mineral Resources Engineering, Engineering Campus, Universiti Sains Malaysia, 14300 Nibong Tebal, Seberang Perai Selatan, Penang, Malaysia

    Yew Hoong Wong & Kuan Yew Cheong

Authors
  1. Yew Hoong Wong
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Kuan Yew Cheong
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Kuan Yew Cheong.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Wong, Y.H., Cheong, K.Y. ZrO2 thin films on Si substrate. J Mater Sci: Mater Electron 21, 980–993 (2010). https://doi.org/10.1007/s10854-010-0144-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10854-010-0144-5

Keywords

Search

Navigation