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Design and Optimization of an XYZ Parallel Micromanipulator with Flexure Hinges

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Abstract

In this paper, a nearly decoupled XYZ translational compliant parallel micromanipulator (CPM) is designed for micro/nano scale manipulation with features of piezo-driven actuators and flexure hinges. The CPM structure improvement is made to enlarge the workspace and eliminate or reduce the stress stiffening, buckling phenomenon, and parasitic motions of the original XYZ CPM, which leads to a new CPM with a more compact structure. The CPM kinematics, parasitic motions, and workspace are determined analytically, and the mathematical models describing statics and dynamics of the CPM are established to evaluate its related performances, which are verified by the finite element analysis (FEA) undertaken in ANSYS environment. Based on the analytic models, the CPM dimensions have been optimized by resorting to the particle swarm optimization (PSO) approach, which produces a CPM having minimum parasitic motions and satisfying other performance specifications as validated by the FEA simulations.

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Authors and Affiliations

  1. Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Av. Padre Tomás Pereira, Taipa, Macao SAR, People’s Republic of China

    Yangmin Li & Qingsong Xu

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  1. Yangmin Li
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  2. Qingsong Xu
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Correspondence to Yangmin Li.

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Li, Y., Xu, Q. Design and Optimization of an XYZ Parallel Micromanipulator with Flexure Hinges. J Intell Robot Syst 55, 377–402 (2009). https://doi.org/10.1007/s10846-008-9300-z

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  • DOI: https://doi.org/10.1007/s10846-008-9300-z

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