Abstract.
The calculation of the X-ray depth distribution function is an important tool in developing quantitative microanalysis correction procedures, especially for structures with thin layers. We used a Monte Carlo method to calculate depth distribution functions. The depth distributions for a wide range of binary AIIIBV and AIIBVI compounds and their solid solutions have been calculated. Several procedures for thin layers microanalysis based on X-ray depth distribution functions are suggested. Examples of quantitative microanalysis of semiconductor heterostructures with thin layers (d = 0.05−0.5 µm) are presented.
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Correspondence: Tatiana B. Popova, Ioffe Physico-Technical Institute, Polytekhnicheskaya 26, 194021, St. Petersburg, Russia
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Popova, T., Flegontova, E., Bakaleinikov, L. et al. Monte Carlo calculations in X-ray microanalysis of epitaxial layers. Microchim Acta 161, 459–463 (2008). https://doi.org/10.1007/s00604-008-0955-8
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DOI: https://doi.org/10.1007/s00604-008-0955-8