Abstract
A double layered SnO2/WO3 sensing film was prepared on a P-type silicon wafer and the sensing characteristics of SnO2 film and SnO2/WO3 double layered film have been investigated. The micro films were characterized by X-ray diffraction, scanning electron microscope (SEM), line mapping micrograph from SEM, the response and recovery time of SnO2 film and SnO2/WO3 film. Different concentrations of NH3 from 50 to 300 ppb were taken into considerations. Whereas SnO2/WO3 bilayer film shows 25% at 50 ppb and gradually increases to 52% at 300 ppb which is double the response to the single layer SnO2 film. With the increase in the NH3 concentration of NH3, the response and recovery time was improved with SnO2/WO3 layered film.
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Acknowledgements
The authors would like to thank the support in part by the Ministry of Science and Technology, Taiwan under grant No. MOST 107-2221-E-218-032-MY2. Also, this research is financially supported by the Taiwan Carbon Nanotube Technology Corporation.
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Liao, YH., Hsiao, YJ., Nagarjuna, Y. et al. The micro-electro-mechanical systems (MEMS) gas sensor with bilayer SnO2/WO3 films for ammonia detection. Microsyst Technol 28, 287–293 (2022). https://doi.org/10.1007/s00542-019-04732-5
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DOI: https://doi.org/10.1007/s00542-019-04732-5