Skip to main content
SpringerLink
Log in

Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Pyroelectric infrared sensors utilize interfacial polymer bonding, thick porous silica layer and Si3N4 thin film as conventional methods of reducing heat sinking with substrate. The thick polymer and porous silica layers cause additional enhancement in thermal time constant (τ D ) as well thermal mass (C th ) of pyroelectric sensor which reduces the rate of temperature change (dT/dt) and limits responsivity at lower frequencies. The SiO2 thin layer posses lower heat conductivity than Si3N4 thin films and often used in Si bulk micromachining as etch barrier. This paper proposes use of micromachined SiO2 thin membrane as thermal insulation layer in bulk micromachined pyroelectric infrared sensor. The study is supported by the comparative radiation heat transfer, finite element analysis and the practical thermal measurements on fabricated pyroelectric infrared sensor using non destructive thermal imaging method.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  • Aggarwal MD, Batra AK, Guggilla P, Edwards ME (2010) Pyroelectric materials for uncooled infrared detectors: processing, properties and applications. NASA/TM, 216373

  • Chang C, Zheng X, Zhou Y, Dong J (2017) Uncooled microbolometer system-level co-simulation using finite element analysis method and intellectual property core. Microsyst Technol 23(6):2215–2222

    Article  Google Scholar 

  • Crisman E, Drehman A, Miller R, Osinsky A, Volovik D, Vasilyev V (2014) Enhanced AlN nanostructures for pyroelectric sensors. Phys Status Solidi C 11:517–520

    Article  Google Scholar 

  • Gaur SP, Kothari P, Kumar P, Rangra K, Kumar D (2017) Development and integration of near atmospheric N2 ambient sputtered Au thin film for enhanced infrared absorption. Infrared Phys Technol 82:154–159

    Article  Google Scholar 

  • Hodgkinson J, Smith R, H WO, Saffell JR, Tatam RP (2013) Non dispersive infrared measurement of Carbon dioxide at 4.2 µm in a compact and optically efficient sensor. Sens Actuators B Chem 86:580–588

    Article  Google Scholar 

  • Hsiao CC, Yu SY (2012) Improved response of ZnO films for pyroelectric devices. Sensors 12:17007–17019

    Article  Google Scholar 

  • Hyseni G, Caka N, Hyseni K (2010) Infrared thermal detectors parameters: semiconductor bolometers versus pyroelectrics. Wseas Trans Circuits Syst 4:238–247

    Google Scholar 

  • Li L, Zhang L, Yao X, Li B (2004) Computer simulation of temperature field of multilayer pyroelectric thin film IR detector. Ceram Int 30:1847–1850

    Article  Google Scholar 

  • Stan GE, Botea M, Boni GA, Pintilie L (2015) Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate. Appl Surf Sci 353:1195–1201

    Article  Google Scholar 

  • Wendong Z, Qiulin T, Jun L, Chenyang X, Jijun X, Xiujiang C (2010) Two channel IR gas sensor with two detectors based on LiTaO3 single crystal wafer. Opt Laser Technol 42(8):1223–1228

    Article  Google Scholar 

  • Whatmore RW (2014) Characterization of pyroelectric materials. In: Cain MG (ed) Characterization of ferroelectric bulk materials and thin films. Springer Series in Measurement Science and Technology, Dordrecht, pp 65–86

    Google Scholar 

  • Whatmore RW, Watton R (2001) Pyroelectric devices and materials. In: Capper P, Elliott CT (eds) Infrared detectors and emitters: materials and devices. Kluver Academic Publisher, Boston, MA, pp 99–147

    Chapter  Google Scholar 

  • Yamamoto K, Goericke F, Guedes A, Jaramillo G, Hada T, Pisano AP, Horsley D (2014) Pyroelectric aluminium nitride micro electromechanical system infrared sensor with wavelength selective infrared absorption. Appl Phys Lett. doi:10.1063/1.4869442

    Google Scholar 

Download references

Acknowledgements

Authors acknowledge support from Council of Scientific and Industrial Research under project PSC 201. Research fellowship from TEQIP is gratefully acknowledged by one of the authors.

Author information

Author notes

  1. Dinesh Kumar

    Present address: YMCA University of Science and Technology, Faridabad, 121006, India

Authors and Affiliations

  1. Smart Sensors and Actuators Group, Central Electronics Engineering Research Institute, Pilani, 333031, India

    Surender P. Gaur, Prem Kumar & Kamaljit Rangra

  2. Department of Electronic Science, Kurukshetra University, Kurukshetra, 136119, India

    Surender P. Gaur & Dinesh Kumar

Authors
  1. Surender P. Gaur
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Prem Kumar
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Kamaljit Rangra
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Dinesh Kumar
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Surender P. Gaur.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Gaur, S.P., Kumar, P., Rangra, K. et al. Efficient thermal utilization in MEMS bulk micromachined pyroelectric infrared sensor using thermal oxide thin layer. Microsyst Technol 24, 1603–1608 (2018). https://doi.org/10.1007/s00542-017-3560-0

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s00542-017-3560-0

Search

Navigation