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Analytical study on effect of piezoelectric patterns on frequency shift and support loss in ring-shaped resonators for biomedical applications

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Abstract

One of the most vital issue in FBAR is enhancing mass sensitivity and restraining energy loss. A ring-shaped piezoelectric resonator was proposed for biomedical applications. The proposed ring-shaped resonator comprises with a multilayer of Pt/Ti/PZT/Ti/Pt/SiO2, deposited on the silicon-on-insulator wafer and expected to be a contour mode. The ring-shaped resonator reacts to certain voltage vibration with a mass perturbation to get Eigenstate vibration or frequency shifts which could be transferred to electrical signals by converse piezoelectric effect. In this paper, vibration modes with high-frequency shift due to a small mass perturbation of 10 ng are analytical evaluated to achieve a higher sensitivity. In order to estimate the sensitivity of the ring-shaped resonator against the mass perturbation, the simulated analysis is conducted by COMSOL from two aspects including (a) the effect of PZT pattern miniaturization and distribution on frequency shift (from viewpoint of vibration mode shape); (b) achieving low support energy loss through analyzing the support displacement. It is found that frequency shift of PZT pattern C with Eigenstate mode 5 is higher than that of others and the support displacement is also small for this combination.

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Acknowledgments

Part of this work is financially supported by Jilin University Matching Funds for Leading Professor Program, Scientific Research Funds of 985 Project, and by the Japan Society for the Promotion of Science through the ‘Funding Progarm for World-Leading Innovative R&D on Science and Technology’, initiated by the Council for Science and Technology Policy. The authors would like to thank Mr. Takahisa Sagawa, Dr. Jian Lu and Dr. Ryutaro Maeda (presently with Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology, Tsukuba 305-8564, Japan) for research assistance. Special thanks are also given to Prof. Z. Y. Mao at Zhejiang University (Hangzhou, China), and Prof. M. Esashi at Tohoku University (Sendai, Japan) for their continuous supports and profound encouragements.

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Authors and Affiliations

  1. Micro Engineering and Micro Systems Laboratory, School of Mechanical Science and Engineering, Jilin University, Changchun, 130025, China

    Yang Liu, Dingkang Wang & Dong F. Wang

  2. Department of Electrical and Computer Engineering, University of Florida, Gainesville, 32611, USA

    Dingkang Wang

  3. Research Center for Ubiquitous MEMS and Micro Engineering, National Institute of Advanced Industrial Science and Technology, Tsukuba, 305-8564, Japan

    Dong F. Wang

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  1. Yang Liu
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  2. Dingkang Wang
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Correspondence to Dong F. Wang.

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Liu, Y., Wang, D. & Wang, D.F. Analytical study on effect of piezoelectric patterns on frequency shift and support loss in ring-shaped resonators for biomedical applications. Microsyst Technol 23, 2899–2909 (2017). https://doi.org/10.1007/s00542-016-3112-z

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  • DOI: https://doi.org/10.1007/s00542-016-3112-z

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