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Simulation and experimental analysis of thermo-mechanical behavior of microresonators under dynamic loading

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Abstract

Simulation, finite element analysis and experimental investigations of the dynamical response of a microresonator under electrostatic actuation are presented in this paper. The scope of this paper is to characterize the influence of thermo-mechanical behavior of the material on the frequency response, amplitude and velocity of oscillations under continuous actuation. The effect of the thermoelastic damping on vibrating structures is experimentally investigated by measuring the loss in amplitude and velocity of oscillations as a function of time and the changes in quality factor. The tests are performed in ambient conditions and in vacuum in order to separate the extrinsic damping of beam by the intrinsic effect given by the thermoelastic damping. The vibrating structure under investigation is a polysilicon clamped–clamped beam.

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Acknowledgments

This work was supported by a grant of the Romanian National Authority for Scientific Research, CNCS-UEFISCDI, project number PN-II-RU-TE-2011-3-0106.

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Authors and Affiliations

  1. Technical University of Cluj-Napoca, Bd. Muncii 103-105, Cluj-Napoca, 400641, Romania

    Marius Pustan, Corina Birleanu & Cristian Dudescu

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  1. Marius Pustan
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  2. Corina Birleanu
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  3. Cristian Dudescu
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Correspondence to Marius Pustan.

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Expanded paper from DTIP 2012 Symposium.

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Pustan, M., Birleanu, C. & Dudescu, C. Simulation and experimental analysis of thermo-mechanical behavior of microresonators under dynamic loading. Microsyst Technol 19, 915–922 (2013). https://doi.org/10.1007/s00542-012-1728-1

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  • DOI: https://doi.org/10.1007/s00542-012-1728-1

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