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Analysis of an in-plane micro-generator with various microcoil shapes

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Abstract

This study presents an analysis of an in-plane micro-generator with various microcoil shapes and multiple aspects of coupling, and reports the fabrication of a prototype micro-generator. It is important to establish analytical solutions for the micro-generator to predict the induced voltage. These analytical solutions can be used to estimate the micro-generator power to reduce the experimental time and the cost. Understanding the physical meanings of the variables can optimize the structure of the micro-electromagnetic generator. This model considers electromagnetism, kinematics, and geometry. The proposed in-plane rotary electromagnetic micro-generator was fabricated using low-temperature co-fired ceramic technology to co-fire the silver microcoils on the ceramic substrate with different shaped coils (e.g., square-shaped, circle-shaped and sector-shaped) both with the printing linewidth and 100 μm spacing of these microcoils. A planar permanent magnet with an outer diameter of 9 mm and a thickness of 700 μm was sintered by Nd/Fe/B. Its residual induction is 1.4 T. The experimental data in this study can be compared with analytical solutions. Analytical results show that the micro-generator with a sector-shaped microcoil generates a maximum effective value of 218.127 mV induced voltage at 1395.34 rad/s. Experimental measurements show a close agreement with these analytical solutions.

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References

  • Arnold DP (2007) Review of microscale magnetic power generation. IEEE Trans Magn 43:3940–3951

    Article  Google Scholar 

  • Arnold DP, Joung YH, Zana I, Park JW, Das S, Lang JH, Veazie D, Allen MG (2005) High-speed characterization and mechanical modeling of microscale, axial-flux, permanent-magnet generators. The 13th International Conference on Solid-Static Sensors. Actuators Microsyst 1:701–704

    Google Scholar 

  • Beeby SP, Torah RN, Tudor MJ, Glynne-Jones P, O’Donnell T, Saha CR, Roy S (2007) A micro electromagnetic generator for vibration energy harvesting. J Micromech Microeng 17:1257–1265

    Article  Google Scholar 

  • Bernardes AM, Espinosa DCR, Tenório JAS (2004) Recycling of batteries: a review of current processes and technologies. J Power Sources 130:291–298

    Article  Google Scholar 

  • Das S, Arnold DP, Zana I, Park JW, Allen MG, Lang JH (2006) Microfabricated high-speed axial-flux multiwatt permanent-magnet generators-part I: modeling. J Microelectromech Syst 15:1330–1350

    Article  Google Scholar 

  • Espinosa DCR, Bernardes AM, Tenório JAS (2004) An overview on the current processes for the recycling of batteries. J Power Sources 135:311–319

    Article  Google Scholar 

  • Fang HB, Liu JQ, Xu ZY, Donga L, Wang L, Chen D, Cai BC, Liu Y (2005) A MEMS-based piezoelectric power generator for low frequency vibration energy harvesting. Chin Phys Lett 23:732–734

    Google Scholar 

  • Fang HB, Liu JQ, Xu ZY, Donga L, Wang L, Chen D, Cai BC, Liu Y (2006) Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting. Microelectron J 37:1280–1284

    Article  Google Scholar 

  • Fergus JW (2010) Recent developments in cathode materials for lithium ion batteries. J Power Sources 195:939–954

    Article  Google Scholar 

  • Gould CA, Shammas NYA, Grainger S, Taylor I (2008) Thermoelectric technology: micro-electrical and power generation properties. In: Proceedings of the 26th International Conference on Microelectronics, pp 329–332

  • Hande A, Stuart TA (2004) A selective equalizer for NiMH batteries. J Power Sources 138:327–339

    Article  Google Scholar 

  • Herrault F, Ji CH, Shafer RH, Kim SH, Allen MG (2007) Ultraminiaturized milliwatt-scale permanent magnet generators. In: The 14th International Conference on Solid-State Sensors, Actuators Microsyst, pp 899–902

  • Holmes AS, Hong G, Pullen KR (2005) Axial-flux permanent magnet machines for micropower generation. J Microelectromech Syst 14:54–63

    Article  Google Scholar 

  • Kulkarni S, Roy S, O’Donnell T, Beeby S, Tudor J (2006) Vibration based electromagnetic micropower generator on silicon. J Appl Phys 99:P511-1–P511-3

    Google Scholar 

  • Kulkarni S, Koukharenko E, Torah R, Tudor J, Beeby S, O’Donnell T, Roy S (2008) Design, fabrication and test of integrated micro-scale vibration-based electromagnetic generator. Sens Actuators A 145–146:336–342

    Google Scholar 

  • Lin GJ, Chen M, Song DC (2009) Research of micro-power generator based on the dielectric electro active polymer. Int Conf Energy Environ Technol 1:782–786

    Article  Google Scholar 

  • Mateu L, Villavieja C, Mol F (2007) Physics-based time-domain model of a magnetic induction microgenerator. IEEE Trans Magn 43:992–1001

    Article  Google Scholar 

  • Meninger S, Mur-Miranda JO, Amirtharajah R, Chandrakasan AP, Lang JH (2001) Vibration-to-electric energy conversion. IEEE Trans Very Large Scale Integr VLSI Syst 9(1):64–76

    Article  Google Scholar 

  • Mitcheson PD, Reilly EK, Toh T, Wright PK, Yeatman EM (2007) Performance limits of the three MEMS inertial energy generator transduction types. J Micromech Microeng 17:S211–S216

    Article  Google Scholar 

  • Pan CT, Chen YJ (2008) Application of low temperature co-fire ceramics on in-plane micro-generator. Sens Actuators A Phys 144:144–153

    Article  Google Scholar 

  • Raisigel H, Cugat O, Delamare J (2005) Magnetic planar micro generator. The 13th International Conference on solid-state sensors. Actuators Microsyst 1:757–761

    Google Scholar 

  • Roundy S, Wright PK, Pister KS (2002) Micro electrostatic vibration to electricity converters. In: ASME International Mechanical Engineering Congress and Congress and Exposition, pp 1–10

  • Roundy S, Steingart D, Frechette L, Wright P, Rabaey J (2004) Power sources for wireless sensor networks. Wireless sensor networks 2920:1–17

    Article  Google Scholar 

  • Rowe DM, Morgan DV, Kiely JH (1991) Low cost miniature thermoelectric generator. Electron Lett 27:2332–2334

    Article  Google Scholar 

  • Sari I, Balkan T, Kulah H (2008) A micro power generator with planar coils on parylene cantilevers. In: Proceedings of PRIME: 2008 PhD Research in Microelectronics and Electronics, pp 133–136

  • Sari I, Balkan T, Kulah H (2010) An electromagnetic micro power generator for low-frequency environmental vibrations based on the frequency upconversion technique. J Microelectromech Syst 19:14–27

    Article  Google Scholar 

  • Serre C, Perez-Rodrıguez A, Fondevilla N, Morante JR, Montserrat J, Esteve J (2007) Vibrational energy scavenging with Si technology electromagnetic inertial microgenerators. Microsyst Technol 13:1655–1661

    Article  Google Scholar 

  • Serre C, Perez-Rodrıguez A, Fondevilla N, Martincic E, Martınez S, Morante JR, Montserrat J, Esteve J (2008) Design and implementation of mechanical resonators for optimized inertial electromagnetic microgenerators. Microsyst Technol 14:653–658

    Article  Google Scholar 

  • Swallow LM, Luo JK, Siores E, Patel I, Dodds D (2008) A piezoelectric fibre composite based energy harvesting device for potential wearable applications. Smart Mater Struct 17:1–7

    Article  Google Scholar 

  • Tashiro R, Katayama N, Ishizuka Y, Tsuboi F, Tsuchiya K (2000) Development of an electrostatic generator that harnasses the motion of a living body. JSME Int J Ser C 43(4):916–922

    Article  Google Scholar 

  • Wang PH, Dai XH, Fang DM, Zhao XL (2007) Design, fabrication and performance of a new vibration-based electromagnetic micro power generator. Microelectron J 38:1175–1180

    Article  Google Scholar 

  • Yang S, Knickle H (2002) Design and analysis of aluminum/air battery system for electric vehicles. J Power Sources 112:162–173

    Article  Google Scholar 

  • Zhu D, Roberts S, Tudor MJ, Beeby SP (2010) Design and experimental characterization of a tunable vibration-based electromagnetic micro-generator. Sens Actuators A 158:284–293

    Article  Google Scholar 

Download references

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Authors and Affiliations

  1. Department of Mechanical and Electro-Mechanical Engineering, National Science Council Core Facilities Laboratory for Nano-Science and Nano-Technology in Kaohsiung-Pingtung Area, Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung, 804, Taiwan

    Y. J. Chen, C. T. Pan & Z. H. Liu

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  1. Y. J. Chen
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  2. C. T. Pan
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  3. Z. H. Liu
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Correspondence to C. T. Pan.

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Chen, Y.J., Pan, C.T. & Liu, Z.H. Analysis of an in-plane micro-generator with various microcoil shapes. Microsyst Technol 19, 43–52 (2013). https://doi.org/10.1007/s00542-012-1635-5

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  • DOI: https://doi.org/10.1007/s00542-012-1635-5

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