Abstract
An acceleration sensor from polymer has been developed which balances a proof mass by magnetic forces. The sensor is fabricated from a polyimide membrane with conductor paths from gold patterned by photolithography and etching, a frame manufactured by ultrasonic hot embossing, and permanent magnets fixed to the frame. Except the conductor path and permanent magnets, all components are made of polymers on a planar substrate, and then the frame is kinked forming the desired three-dimensional structure. In a first try, a sensitivity of 0.46 V/(m/s²) was achieved, and cross axis sensitivity error was less than 3 %.
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Li, J., Schomburg, W.K. Electromagnetically force balanced polymer accelerometer. Microsyst Technol 19, 219–226 (2013). https://doi.org/10.1007/s00542-012-1558-1
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DOI: https://doi.org/10.1007/s00542-012-1558-1